A comparative study was carried out on the defect structure and electronic properties of
normalGaAs
layers grown under similar conditions by electroepitaxy (electromigration controlled) and by thermal LPE. It was found that the density of certain microdefects, commonly present in
normalGaAs
layers, is significantly smaller (about an order of magnitude) in electroepitaxially grown than in thermally grown layers. It was also found that electroepitaxial layers exhibit greater carrier mobility and diffusion length than the thermally grown layers; in addition, electroepitaxially grown p‐n junctions exhibited lower saturation current than the thermally grown junctions. The differences in the characteristics of two types of layers are attributed to corresponding differences in the nature of the driving forces for growth.