Surface morphology of TiOx films prepared by an ion-beam-assisted reactive deposition method

Sasase, Masato; Miyake, Kiyoshi; Yamaki, Tokuo; Takano, Ichiro; Isobe, S.

doi:10.1016/0040-6090(96)08668-3

Cited by 8 publications

(3 citation statements)

References 7 publications

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“…These results indicate that the incident energy density increases as the acceleration voltage increases and takes a value of about 8.8 mW/cm 2 at 600 V. Sasase et al reported that the lowtemperature crystallization of TiO 2 was realized following the irradiation of helium ions with an energy density above 40 mW/cm 2 . 23) This indicates that the oxygen ions are more effective for the crystallization of the TiO 2 films than the helium ions at room temperature. This may be due to the much larger atomic mass of the oxygen ion than that of the helium ion.…”

Section: Resultsmentioning

confidence: 99%

Photocatalytic Characteristics and Structure of TiO₂Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Sakai

Ikegaya

Ishihara

et al. 2010

Jpn. J. Appl. Phys.

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Beginning with the Pauli-Fierz theory, we construct a model for multi-graviton theory. Couplings between gravitons belonging to nearest-neighbour 'theory spaces' lead to a discrete mass spectrum. Our model coincides with the Kaluza-Klein theory whose fifth dimension is latticized. We evaluate one-loop vacuum energy in models with a circular latticized extra dimension as well as with compact continuous dimensions. We find that the vacuum energy can take a positive value, if the dimension of the continuous spacetime is 6, 10, . . . . Moreover, since the amount of vacuum energy can be an arbitrary small value depending on the choice of parameters in the model, our models are useful for explaining the small positive dark energy in the present universe.

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Section: Resultsmentioning

confidence: 99%

Photocatalytic Characteristics and Structure of TiO₂Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Sakai

Ikegaya

Ishihara

et al. 2010

Jpn. J. Appl. Phys.

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“…[4] For a special application, thus, control of the structure formation during film fabrication appears to be of great importance. During the last years, a variety of technical approaches, such as solgel processing, [5] reactive magnetron sputtering, [6,7] chemical vapour deposition, [8,9] and ion beam assisted deposition, [10] were established for the preparation of TiO 2 films. Generally, the as-deposited films are amorphous, exhibiting occasionally admixtures of small amounts of anatase TiO 2 .…”

Section: Introductionmentioning

confidence: 99%

Compositional and structural evolution of the titanium dioxide formation by thermal oxidation

Gnaser

Yong-Liang

et al. 2008

Chinese Phys. B

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“…Examples for such devices include antireflective coatings, dielectric mirrors for lasers, metal mirrors with enhanced reflection, and filters. Its excellent optical transmittance, high refractive index and high chemical stability are the attractive features for optical coatings [Williams, 1983;Lobl, 1994;Sasase, 1996;Miao, 2003].…”

Section: Applications Of Tiomentioning

confidence: 99%

Fabrication and characterisation of rutile based hybrid thin films

Dangeti¹

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Titanium dioxide (TiO 2) with a rutile structure is known for its useful physical, chemical, mechanical and biomedical properties. Increasing efforts have been made to fabricate this material in the form of thin films for various applications, like chemical catalysts, optical devices and electromagnetic devices. More recently, it has been discovered that rutile has good biocompatibility and is a potential friction-reducing and wear resistant material, and thus it has a great potential for applications in human implants, medical devices and other tribological applications. In the present work, efforts have been made to produce protective rutile-TiO 2 films. This has been achieved by three routes: 1) thermal oxidation of bulk titanium 2) thermal oxidation of titanium film and 3) sputter deposition of rutile-TiO 2 with the aid of Ti underlayers. In order to understand the thermal oxidation mechanism and kinetics, a systematic study was carried out on bulk titanium. The effect of cooling rate on the adhesion of the oxide layer on titanium has been investigated. Efforts have been made to deposit titanium films onto AISI 316L stainless steel by magnetron sputtering, and then to partially convert the titanium films to titanium oxide by thermal oxidation. The resultant coating has a layered structure, comprising of rutile-TiO 2 layer at the top, an oxygen and nitrogen containing α-Ti layer in the middle and a diffuse-type interface. Such a hybrid coating system showed good adhesion with the substrate, improved corrosion resistance, and significantly enhanced surface hardness and tribological properties compared to stainless steel in terms of much reduced friction coefficient and increased wear resistance. Attempts have been made to fabricate TiO 2 films on 316L stainless steel by nonreactive magnetron sputtering of a rutile TiO 2 target, with and without a titanium underlayer. The effect of titanium underlayer thickness has been investigated in terms of phase evolution, film morphology, corrosion resistance, adhesion strength, hardness and tribological characteristics. Results showed that a titanium underlayer has a significant effect on the phase evolution in the TiO 2 film. Without this underlayer, an anatase-TiO 2 film is produced, in consistence with many other investigations. However, it is found for the first time that with a titanium underlayer, a rutile-TiO 2 film can be formed on the ATTENTION: The Singapore Copyright Act applies to the use of this document. Nanyang Technological University Library v substrate. The underlayer characteristics play vital role in oxide film phase formations. The resultant rutile films show much improved friction, wear and corrosion properties, which vary with the thickness of the titanium underlayer.

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Surface morphology of TiOx films prepared by an ion-beam-assisted reactive deposition method

Cited by 8 publications

References 7 publications

Photocatalytic Characteristics and Structure of TiO₂Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Photocatalytic Characteristics and Structure of TiO₂Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Compositional and structural evolution of the titanium dioxide formation by thermal oxidation

Fabrication and characterisation of rutile based hybrid thin films

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Surface morphology of TiOx films prepared by an ion-beam-assisted reactive deposition method

Cited by 8 publications

References 7 publications

Photocatalytic Characteristics and Structure of TiO2Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Photocatalytic Characteristics and Structure of TiO2Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Compositional and structural evolution of the titanium dioxide formation by thermal oxidation

Fabrication and characterisation of rutile based hybrid thin films

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Product

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Photocatalytic Characteristics and Structure of TiO₂Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature

Photocatalytic Characteristics and Structure of TiO₂Film Deposited by Oxygen-Ion-Assisted Reactive Evaporation at Low Temperature