Surface polishing of three dimensional micro structures

Lim, Chang-Hyun; Kim, W.B.; Lee, S.H.; Lee, J.I.; Kim, Y.J.; Lee, S.J.

doi:10.1109/mems.2004.1290683

Cited by 5 publications

(5 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…MRF is being actively applied in magnetic field assisted finishing. Previous research efforts have reported the development of several new magnetic field assisted finishing techniques with MRF [1][2][3]. These processes are proposed for uses for external surfaces of optics, silicon products and micro structures.…”

Section: Introductionmentioning

confidence: 99%

Study of Internal Magnetic Field Assisted Finishing for Copper Tubes with MRF (Magneto-Rheological Fluid)-Based Slurry

Satō

Yamaguchi

Shinmura

et al. 2007

KEM

View full text Add to dashboard Cite

This research studied the internal magnetic field assisted finishing with MRF (Magneto-rheological Fluid)-based slurry for copper tubes.MRF-based slurry that included diamond abrasives was applied to the internal magnetic field assisted finishing for copper tubes and the finishing characteristics were studied. The results showed that the exciting current and the abrasive size changed the finishing characteristics of MRF-based slurry. This finishing process creates a smooth mirror finished surface with few directional cutting marks on the surface of the copper tube.

show abstract

Section: Introductionmentioning

confidence: 99%

Study of Internal Magnetic Field Assisted Finishing for Copper Tubes with MRF (Magneto-Rheological Fluid)-Based Slurry

Satō

Yamaguchi

Shinmura

et al. 2007

KEM

View full text Add to dashboard Cite

show abstract

“…By contrast, machining and erosive manufacturing methods cause rough surfaces, impair the glass at the machining point and often require a finishing (Belloy et al 2002;Lim 2004). Analogous limitations were considered for etching processes.…”

Section: Discussionmentioning

confidence: 99%

Micro structuring of inorganic glass by hot embossing of coated glass wafers

et al. 2009

View full text Add to dashboard Cite

Hot embossing is an economical manufacturing process for structuring of glass. However, this process is limited by sticking of glass melts on the moulding tools. In order to prevent this problem, the glass substrate was coated with thin metal, carbon and oxide layers. In the current work, the behaviour and suitability of the coatings for the embossing process were investigated. As a result, it was found that all coatings showed a clear decrease of adhesive forces and an increase of sticking temperature out of the range relevant for hot embossing. The examined coatings behave ductile, however, under larger elongations they tend to crack. Examples of fluidic structures with lateral geometries in millimetre and micrometre range were realized. The coatings could be successfully applied in moulding experiments without reduction of quality of embossed structures by sticking of the glass melts. The largest aspect ratio of embossing depth to structural width amounted to 3

show abstract

“…Weiterhin gibt es eine Reihe von seriellen Verfahren. Diese sind meist mit höheren Stückkosten verbunden oder sie schädigen das Glas an der Oberfläche [8,9,10,11].…”

Section: Introductionunclassified

Isothermes Heißprägen von beschichteten Glaswafern

et al. 2009

View full text Add to dashboard Cite

Hot-embossing is an economical manufacturing process for the structuring of glass. For structures with dimensions in the millimetre and micrometre range and high aspect ratios it is necessary to work under isothermal process conditions. In order to prevent the sticking of the glass to the tool, the glass substrates were coated with thin metal, carbon and oxide layers. The layers were examined with respect to their behaviour change and suitability for the embossing process. All layers showed a clear reduction of the adhesive forces and a shift of the sticking temperature to higher temperature ranges. Some layers led even to the abolition of any sticking in the entire viscosity range relevant for the hot-embossing of glass. The examined layers behave ductile with small strains, however, under larger elongations tend to cracking. Fluidic demonstration structures were realized and hot-embossed successfully in float glass. The lateral design geometries of the channels and chambers lay between 10 µm and 2 mm with embossing depths up to 2 mm. The largest aspect ratio of embossing depth to structural width amounted to 3. The attainable accuracies and surface qualities correspond thereby to that of the used mould insert. The results of the research show the extraordinary potential of the new coating strategy for the hot-embossing of glass

show abstract

Surface polishing of three dimensional micro structures

Cited by 5 publications

References 8 publications

Study of Internal Magnetic Field Assisted Finishing for Copper Tubes with MRF (Magneto-Rheological Fluid)-Based Slurry

Study of Internal Magnetic Field Assisted Finishing for Copper Tubes with MRF (Magneto-Rheological Fluid)-Based Slurry

Micro structuring of inorganic glass by hot embossing of coated glass wafers

Isothermes Heißprägen von beschichteten Glaswafern

Contact Info

Product

Resources

About