2020
DOI: 10.3390/s20061690
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Surface Potential/Charge Sensing Techniques and Applications

Abstract: Surface potential and surface charge sensing techniques have attracted a wide range of research interest in recent decades. With the development and optimization of detection technologies, especially nanosensors, new mechanisms and techniques are emerging. This review discusses various surface potential sensing techniques, including Kelvin probe force microscopy and chemical field-effect transistor sensors for surface potential sensing, nanopore sensors for surface charge sensing, zeta potentiometer and optica… Show more

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Cited by 34 publications
(18 citation statements)
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References 127 publications
(196 reference statements)
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“…Al 2 O 3 , considered to be a good dielectric with very low leakage current, is used in GHFET. Pd is chosen as a, FM, where Pd reacts reversibly with H 2 gas ,, and causes the SPM at the Pd|Al 2 O 3 interface. The GHFET devices are fabricated in this study with Pd layer thickness of 2 nm.…”
Section: Resultsmentioning
confidence: 99%
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“…Al 2 O 3 , considered to be a good dielectric with very low leakage current, is used in GHFET. Pd is chosen as a, FM, where Pd reacts reversibly with H 2 gas ,, and causes the SPM at the Pd|Al 2 O 3 interface. The GHFET devices are fabricated in this study with Pd layer thickness of 2 nm.…”
Section: Resultsmentioning
confidence: 99%
“…For a conductive FM, capacitance–voltage (C–V) measurement in FM|dielectric|metal structures can also be used to measure SPM from the voltage shift . In ion sensitive field effect transistor (ISFET), the SPM is measured from the change in feedback voltage that maintains a constant device current . The SPM in graphene field effect transistor (GFET) based chemical sensors can be measured from the shift of Dirac voltage with electroyte gating. , However, liquid gate perturbs the SPM measurement by a charge screening mechanism in the GFET. …”
Section: Introductionmentioning
confidence: 99%
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“…Surface potential and surface-charge-sensing biomolecular techniques have attracted a wide range of research interest in recent decades [18][19][20][21]. The ionized states of molecular analytes on solid surfaces are neither well-studied nor understood.…”
Section: Introductionmentioning
confidence: 99%