2009
DOI: 10.1063/1.3267147
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Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Abstract: We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays ͑NRAs͒, using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection ͑AR͒ properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR la… Show more

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Cited by 49 publications
(25 citation statements)
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“…For quite small NWs, theoretical studies indicate that the diameter and the length of the NWs considerably affect the reflectance [9,10]. Monotonic decrease of the reflectance with the increase of the NW diameter was also observed [12]. The reflectance is also considerably affected by the slope of the NWs [16].…”
Section: Introductionmentioning
confidence: 99%
“…For quite small NWs, theoretical studies indicate that the diameter and the length of the NWs considerably affect the reflectance [9,10]. Monotonic decrease of the reflectance with the increase of the NW diameter was also observed [12]. The reflectance is also considerably affected by the slope of the NWs [16].…”
Section: Introductionmentioning
confidence: 99%
“…4,5) However, there is one technical challenge, which hinders multilayer thin film applications, due to the mismatch in thermal properties of different materials. 1,6) On the other hand, inspired by the cornea and the wings of some species of moths consisting of an array of raised protuberances, 7,8) many sub-wavelength biomimetic quasi-moth-eye structures, such as nanopyramids, nanocones, nanonipples, and nanotips, [9][10][11][12][13] are investigated as broadband antireflection structures. Among them, silicon quasi-moth-eye structures have been successfully demonstrated as broadband antireflection structures.…”
mentioning
confidence: 99%
“…[25][26][27] Our moth-eye textured PET packaging surface has hydrophobic properties comparable to those reported previously. [28,29] Photographs of a water droplet on a piece of moth-eye textured PET packaging sheet and unpatterned planar PET packaging sheet are shown in Fig. 5a and b, respectively.…”
Section: Introductionmentioning
confidence: 99%