2014
DOI: 10.1007/s10854-014-2487-9
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Surface properties of AlN and Al x Ga1−x N epitaxial layers characterized by angle resolved X-ray photoelectron spectroscopy

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Cited by 6 publications
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“…Figure 1(d) depicts the XPS high-resolution spectra of Al 2p centered at binding energy 73.8 eV corresponds to the Al-N bond present in the AlN active layer. Figure 1(e) displays the in-depth analysis of N 1s spectra consisting of three sub-peaks (A, B, and C) conforming to the N-Al-O, N-Al, and N-N bonds at the binding energies ∼398 eV, ∼396.6 eV, and ∼395.8 eV, respectively [21,30,31]. It is seen that most of the nitrogen is found to be bonded with Al and form the AlN compound.…”
Section: Resultsmentioning
confidence: 98%
“…Figure 1(d) depicts the XPS high-resolution spectra of Al 2p centered at binding energy 73.8 eV corresponds to the Al-N bond present in the AlN active layer. Figure 1(e) displays the in-depth analysis of N 1s spectra consisting of three sub-peaks (A, B, and C) conforming to the N-Al-O, N-Al, and N-N bonds at the binding energies ∼398 eV, ∼396.6 eV, and ∼395.8 eV, respectively [21,30,31]. It is seen that most of the nitrogen is found to be bonded with Al and form the AlN compound.…”
Section: Resultsmentioning
confidence: 98%
“…Compared with other III-nitrides, it has the widest direct band gap of 6.2 eV at room temperature, high stability, high volume resistivity (10 11 -10 13 ), high thermal conductivity (285 W mK −1 ), high breakdown field (1.2-1.8 × 10 6 V cm −1 ) [6][7][8][9][10][11][12][13]. These characteristics make AlN have a wide range of applications, in optoelectronic and acoustoelectronic devices, such as surface wave and bulk acoustic wave devices [14][15][16], field emission displays [17], light-emitting diodes [18] and laser diodes [19][20][21][22][23][24]. AlN is widely used as a buffer layer for epitaxial growth of gallium nitride/aluminum gallium nitride [25,26].…”
Section: Introductionmentioning
confidence: 99%