Abstract:Diamond wire saw cutting multi-crystalline silicon (mc-Si) wafers has the advantage of high cutting rate. However, it is difficult to follow the current additive-free wet acid etching process to prepare the anti-reflective textured surface due to the obvious saw marks on the surface of the as-sawn wafer. In response to this problem, this paper proposes a turbine-type stirred slurry pretreatment process to modify the surface of mc-Si wafers cut by diamond wire to make it suitable for the subsequent conventional… Show more
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