Semifluorinated azobenzene liquid‐crystalline side‐chain polymers with different perfluoroalkyl lengths are used to develop surface relief gratings (SRGs). With sufficient fluorinated side‐chain lengths, surface relief gratings could be completely suppressed due to the self‐assembled liquid‐crystalline order at the surface. This indicates that there is a surface‐dependent nature to SRG formation. The SRG formation from the semifluorinated azobenzene liquid‐crystalline side‐chain polymers is compared to methoxy‐terminated azobenzene side‐chain polymers, and results show that the perfluoroalkyl–azobenzene polymers require a longer formation time than the methoxy‐terminated polymers.