Optical Fabrication, Metrology, and Material Advancements for Telescopes 2004
DOI: 10.1117/12.550573
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Surface roughness results using a hydrodynamic polishing tool (HyDra)

Abstract: HyDRa is a hydrodynamic radial polishing tool ideal for the corrective lapping and fine polishing of diverse materials by means of an accelerated abrasive flux. The roughness of an optical surface is analysed for a continuous manufacturing process, beginning with the basic generation steps up to a finished optical surface. These results were obtained using a Linnik interferometer.

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Cited by 4 publications
(3 citation statements)
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“…To sustain a decreasing PSD tendency and thus, smaller values of the highfrequency RMS, the use of smaller grit sizes is suggested. Integrating the highfrequency domain of the PSD to obtain the RMS is also equivalent to calculating the RMS directly from a 50 × 50 μm area of the micro-interferogram, according to a standard definition of micro-roughness [16]. This micro roughness obtained with the HyDRa process (3 nm) is comparable to the roughness reported in current FJP literature [5].…”
Section: Polishing Example: Psd and Polishing Of Fabry-perot Etalonsmentioning
confidence: 64%
“…To sustain a decreasing PSD tendency and thus, smaller values of the highfrequency RMS, the use of smaller grit sizes is suggested. Integrating the highfrequency domain of the PSD to obtain the RMS is also equivalent to calculating the RMS directly from a 50 × 50 μm area of the micro-interferogram, according to a standard definition of micro-roughness [16]. This micro roughness obtained with the HyDRa process (3 nm) is comparable to the roughness reported in current FJP literature [5].…”
Section: Polishing Example: Psd and Polishing Of Fabry-perot Etalonsmentioning
confidence: 64%
“…The RMS obtained by integrating the high-frequency domain of the PSD is also the same as is obtained by calculating the RMS directly from a 50 μm × 50 μm area of the microinterferogram (see Fig. 9), according to a standard definition of microroughness [11]. This microroughness obtained with the HyDRa process is comparable to the roughness reported in current FJP literature [4].…”
Section: Power Spectral Densitymentioning
confidence: 92%
“…At the dawn of the HyDRa project development [10,11], low removal rates and high internal tool wear were common. The importance of some operational parameters was still under investigation.…”
Section: Tool Characterizationmentioning
confidence: 99%