2020
DOI: 10.35848/1347-4065/abbdc6
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Surface sterilization using LF-microwave hybrid plasma

Abstract: Surface sterilization using LF-microwave hybrid plasma, which is a low-frequency (LF) plasma jet assisted by a microwave discharge, was investigated. Hybrid plasma is an atmospheric pressure non-thermal plasma and has a large number of reactive species. To improve the performance of surface sterilization using LF-microwave hybrid plasma, two types of discharge gas supply systems were employed. The first type (Type I) introduces argon and oxygen gas flows separately into the discharge region. The second type (T… Show more

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Cited by 6 publications
(20 citation statements)
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“…The LF-microwave hybrid plasma source is composed of a rectangular waveguide (WRJ-2), which contains a cylindrical slotted antenna surrounding a discharge quartz tube, and a cylindrical copper electrode, which is installed in the discharge quartz tube. [27][28][29] Two slits are arranged on the cylindrical slotted antenna. The frequency of the microwave was 2.45 GHz and the power could be increased up to 2 kW.…”
Section: Methodsmentioning
confidence: 99%
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“…The LF-microwave hybrid plasma source is composed of a rectangular waveguide (WRJ-2), which contains a cylindrical slotted antenna surrounding a discharge quartz tube, and a cylindrical copper electrode, which is installed in the discharge quartz tube. [27][28][29] Two slits are arranged on the cylindrical slotted antenna. The frequency of the microwave was 2.45 GHz and the power could be increased up to 2 kW.…”
Section: Methodsmentioning
confidence: 99%
“…A short plunger was installed for impedance matching between the plasma and the microwave circuit, and the forward, reflected powers were measured by using a directional coupler with power meters. [27][28][29] The flow rate of each gas was adjusted by each gas-flow controller. The LF plasma jet was generated at the beginning of the operation by applying an LF high voltage to a cylindrical copper electrode in the discharge quartz tube.…”
Section: Methodsmentioning
confidence: 99%
See 3 more Smart Citations