Abstract:Direct current (DC) and radio frequency (RF) magnetron sputtering methods were selected for conducting the deposition of structural materials, namely ceramic and metallic co-depositions. A total of six configurations were deposited: single thin layers of oxides (Cr2O3, SiO2) and co-deposition configurations (50:50 wt.%) as structural materials (W, Be)—(Cr2O3, SiO2), all deposited on 304L stainless steel (SS). A comprehensive evaluation such as surface topology, thermal desorption outgassing, and structural/che… Show more
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