Surface Structure Dependence of Mechanochemical Etching: Scanning Probe-Based Nanolithography Study on Si(100), Si(110), and Si(111)

Xiao, Chen; Xin, Xiaojun; He, Xin; Wang, Hongbo; Chen, Lei; Kim, Seong H.; Qian, Linmao

doi:10.1021/acsami.9b00133

Cited by 34 publications

(18 citation statements)

References 30 publications

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“…[62,63] Likewise, ∆𝑉𝑉 * for wear of a silicon AFM tip ranges from 6.7 Å 3 to 55 Å 3 . [43,46] It has also been shown that ∆𝑉𝑉 * depends on the direction of sliding relative to the crystallographic orientation of the surface being worn, [52,53] and on the molecular structure of the reactant species from which films are grown. [66] For the same molecule, the ∆𝑉𝑉 * also varies depending on the reactivity of the substrate on which the molecule is being sheared.…”

Section: B Interpretations Of the Magnitude Of Activation Volumementioning

confidence: 99%

Activation Volume in Shear-Driven Chemical Reactions

Martini

Kim

2021

Tribol Lett

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Interfacial shear-driven or shear-assisted chemical reactions play an important role in many engineering processes, including reactions between lubricant additives and the surfaces of mechanical components and fabrication of surface topographic features. Mechanistic studies of shear-driven chemical reactions often employ a mechanically assisted thermal-activation model from which a so-called activation volume can be defined. Activation volume is important because it quantifies the efficiency of interfacial shear to drive the reaction. Recent advancements in methods have enabled calculation of activation volume from both nano-and macro-scale experiments as well as simulations. However, the calculated volumes differ by orders of magnitude, even for the same reactant species, and the physical interpretations vary correspondingly. Here, we review how activation volume has been measured and interpreted for shear-driven reactions in the literature with the goal of guiding future efforts to understand and use this important parameter for engineering design through tribochemistry.

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Section: B Interpretations Of the Magnitude Of Activation Volumementioning

confidence: 99%

Activation Volume in Shear-Driven Chemical Reactions

Martini

Kim

2021

Tribol Lett

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“…However, the range of experimentally measured activation volumes can be quite large even for the same material system. For example, for tribochemical wear of silicon tips, the range of activation volumes can be as large as ~6.7-115 Å 3 [9,[11][12][13]. With such a large range, the meaning of "local deformation" becomes obscure, and the simple physical picture of ∆V corresponding approximately to the size of the space occupied by molecular groups involved in the chemical reaction might not be sufficient.…”

Section: Main Textmentioning

confidence: 99%

Physical Origin of the Mechanochemical Coupling at Interfaces

Szlufarska

2021

Phys. Rev. Lett.

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We used density functional theory (DFT) calculations to investigate the physical origin of the mechano-chemical response of materials interfaces. Our results show that the mechano-chemical response can be decomposed into the contribution from the interface itself (deformation of interfacial bonds) and a contribution from the underlying solid. The relative contributions depend on the stiffness of these regions and the contact geometry, which affects the stress distribution within the bulk region. We demonstrate that, contrary to what is commonly assumed, the contribution to the activation volume from the elastic deformation of the surrounding bulk is significant and, in some case, may be dominant. We also show that the activation volume and the mechanochemical response of interfaces should be finite due to the effects on the stiffness and stress distribution within the near-surface bulk region. Our results indicate that the large range of activation volumes measured in the previous experiments even for the same material system might originate from the different degrees of contributions probed from the bulk vs. interface.

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“…Finally, besides interfacial forces, surface wear caused by frictional shear stress is likely to complicate the dynamics [4,159]. Tribochemical reactions may occur between water molecules and the solid surface when the activation energy of these reactions is reduced by an external mechanical action [5,[160][161][162][163][164][165][166][167]. The structure and surface energy of the adsorbed water layer on dynamically changing tribological interfaces may also play vital roles in the mechanochemistry involved in the material removal phenomenon.…”

Section: Perspectivesmentioning

confidence: 99%

Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

Xiao

Shi

et al. 2019

Colloids and Interfaces

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Most inorganic material surfaces exposed to ambient air can adsorb water, and hydrogen bonding interactions among adsorbed water molecules vary depending on, not only intrinsic properties of material surfaces, but also extrinsic working conditions. When dimensions of solid objects shrink to micro- and nano-scales, the ratio of surface area to volume increases greatly and the contribution of water condensation on interfacial forces, such as adhesion (Fa) and friction (Ft), becomes significant. This paper reviews the structural evolution of the adsorbed water layer on solid surfaces and its effect on Fa and Ft at nanoasperity contact for sphere-on-flat geometry. The details of the underlying mechanisms governing water adsorption behaviors vary depending on the atomic structure of the substrate, surface hydrophilicity and atmospheric conditions. The solid surfaces reviewed in this paper include metal/metallic oxides, silicon/silicon oxides, fluorides, and two-dimensional materials. The mechanism by which water condensation influences Fa is discussed based on the competition among capillary force, van der Waals force and the rupture force of solid-like water bridge. The condensed meniscus and the molecular configuration of the water bridge are influenced by surface roughness, surface hydrophilicity, temperature, sliding velocity, which in turn affect the kinetics of water condensation and interfacial Ft. Taking the effects of the thickness and structure of adsorbed water into account is important to obtain a full understanding of the interfacial forces at nanoasperity contact under ambient conditions.

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Surface Structure Dependence of Mechanochemical Etching: Scanning Probe-Based Nanolithography Study on Si(100), Si(110), and Si(111)

Cited by 34 publications

References 30 publications

Activation Volume in Shear-Driven Chemical Reactions

Activation Volume in Shear-Driven Chemical Reactions

Physical Origin of the Mechanochemical Coupling at Interfaces

Thickness and Structure of Adsorbed Water Layer and Effects on Adhesion and Friction at Nanoasperity Contact

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