Surface study of Type 6063 aluminium alloys for vacuum chamber materials

Mohri, Mamoru; Miyagawa, Shigeru; Odagiri, Hitoshi; Hashiba, Masao; Yamashina, T.; Ishimaru, Hajime

doi:10.1016/0042-207x(84)90055-1

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Outgassing1

Aluminum1

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1984

1998

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Cited by 10 publications

(2 citation statements)

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“…The time necessary to outgas a material depends on the materials to be outgassed, its thickness and the temperature. [42]- [44] Glasses outgas water and other gases at high temperatures. Generally the highest temperature, consistent with not degrading the material, should be used in vacuum baking.…”

Section: Outgassingmentioning

confidence: 99%

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The Low-Pressure Gas and Vacuum Processing Environment

Mattox¹

1998

Handbook of Physical Vapor Deposition (PVD) Processing

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Section: Outgassingmentioning

confidence: 99%

“…[42] Mill rolled aluminum has an outgassing rate ~100 times that of mill rolled stainless steel. However the natural oxide that forms on aluminum and thickens with time is rather porous and can give appreciable outgassing.…”

Section: Aluminummentioning

confidence: 99%