2019 IEEE 2nd Ukraine Conference on Electrical and Computer Engineering (UKRCON) 2019
DOI: 10.1109/ukrcon.2019.8879971
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Surface Wave Technique at Millimeter Waveband for Semiconductor Testing by Photoexcitation

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“…There exist various methods of electromagnetic‐wave non‐destructive testing, such as tomography, reflectometry, ellipsometry and so on. [8–13]. All of them require solving inverse diffraction problem that allows determining physical parameters of materials under study by the measured characteristics of the diffraction field.…”
Section: Introductionmentioning
confidence: 99%
“…There exist various methods of electromagnetic‐wave non‐destructive testing, such as tomography, reflectometry, ellipsometry and so on. [8–13]. All of them require solving inverse diffraction problem that allows determining physical parameters of materials under study by the measured characteristics of the diffraction field.…”
Section: Introductionmentioning
confidence: 99%