“…There are many known effects of surfactants. For example, it was shown for both metallic 1-3 and semiconductor 1,2,4-8 systems that surfactants can enhance two-dimensional (2D) growth, 1,2,7,8 prevent three-dimensional (3D) islanding, 2,6,8 improve bulk crystalline quality, 4,8 increase step velocity, 6 reduce atom surface diffusion, 3 change the crystalline orientation, 1 as well as suppress the coalescence, 5 increase the density, 1 and improve the size uniformity 5 of islands. Most studies of the effects of surfactants have been carried out during molecular beam epitaxy (MBE) or metal organic vapor phase epitaxy (MOVPE), while the role of surfactant elements during chemical vapor deposition (CVD) is still largely unknown.…”