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The article contains sections titled: 1. Introduction 2. Silicon Hydrides 2.1. Monosilane 2.2. Disilane 2.3. Purification 2.4. Uses 2.5. Safety Measures 2.6. Photochemistry 3. Silicon Halides 3.1. Trichlorosilane 3.1.1. Preparation from Elemental Silicon 3.1.2. Preparation from Tetrachlorosilane 3.1.3. Purification 3.1.4. Waste Disposal 3.1.5. Uses 3.2. Tetrachlorosilane 3.2.1. Production 3.2.2. Purification 3.2.3. Uses 3.3. Hexachlorodisilane 3.3.1. Production 3.3.2. Uses 3.4. Other Silicon Chlorides 3.5. Silicon Fluorides 3.6. Silicon Bromides 3.7. Silicon Iodides 4. Silicon Oxides 4.1. Silicon Monoxide 4.1.1. Production 4.1.2. Properties 4.1.3. Uses 4.2. Silicon Sesquioxides 4.3. Other Silicon ‐ Oxygen Compounds 5. Silicon Sulfides 6. Silicon Nitrogen Compounds 7. Silicon Borides
The article contains sections titled: 1. Introduction 2. Silicon Hydrides 2.1. Monosilane 2.2. Disilane 2.3. Purification 2.4. Uses 2.5. Safety Measures 2.6. Photochemistry 3. Silicon Halides 3.1. Trichlorosilane 3.1.1. Preparation from Elemental Silicon 3.1.2. Preparation from Tetrachlorosilane 3.1.3. Purification 3.1.4. Waste Disposal 3.1.5. Uses 3.2. Tetrachlorosilane 3.2.1. Production 3.2.2. Purification 3.2.3. Uses 3.3. Hexachlorodisilane 3.3.1. Production 3.3.2. Uses 3.4. Other Silicon Chlorides 3.5. Silicon Fluorides 3.6. Silicon Bromides 3.7. Silicon Iodides 4. Silicon Oxides 4.1. Silicon Monoxide 4.1.1. Production 4.1.2. Properties 4.1.3. Uses 4.2. Silicon Sesquioxides 4.3. Other Silicon ‐ Oxygen Compounds 5. Silicon Sulfides 6. Silicon Nitrogen Compounds 7. Silicon Borides
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