“…[1][2][3] Various types of parylene dimers, with different functional groups attached to their benzene rings, are used, such as parylene-C bearing a chloride, parylene A bearing a primary amine, and parylene H bearing a formyl group. [4][5][6] Because deposition is conducted in the gas phase, the deposited parylene film exhibits a highly homogeneous thickness, even if the substrate exhibits a very complicated 3D structure. 7,8 Parylene-C, in particular, is widely used in various applications due to its physi-cal and chemical properties, such as transparency and high electric isolation and resistances to organic solvents.…”