2000
DOI: 10.1016/s0022-0248(99)00718-6
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Synchrotron-based impurity mapping

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Cited by 42 publications
(37 citation statements)
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“…15 More details about the operational principles and detection limits of the m-XRF technique can be found elsewhere. 15,[38][39][40] Once a metal precipitate is located, its chemical state can be determined via X-ray absorption microspectroscopy (m-XAS). The position of the X-ray beam is fixed on the precipitate while the energy of the incoming Xray beam is scanned in steps of 1 eV or less across the absorption energy edge of the impurity species of interest (e.g., Fe, Ni, Cu, etc.).…”
Section: Methodsmentioning
confidence: 99%
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“…15 More details about the operational principles and detection limits of the m-XRF technique can be found elsewhere. 15,[38][39][40] Once a metal precipitate is located, its chemical state can be determined via X-ray absorption microspectroscopy (m-XAS). The position of the X-ray beam is fixed on the precipitate while the energy of the incoming Xray beam is scanned in steps of 1 eV or less across the absorption energy edge of the impurity species of interest (e.g., Fe, Ni, Cu, etc.).…”
Section: Methodsmentioning
confidence: 99%
“…Via comparison with standard materials, one can very accurately determine the chemical state of a given impurity species. 15,17,39 The X-ray beam induced current (XBIC) is used to measure the recombination activity of defects in a method analogous to laser/light beam induced current (LBIC). The incoming X-ray beam is used to generate electronhole pairs, which are then collected by a Schottky diode 41 or a pn junction.…”
Section: Methodsmentioning
confidence: 99%
“…[32,33] for details). Measurement geometry was selected for the sample normal, varying between approximately 15°and 45°relative to the incoming beam, and thus the information depth (i.e., thickness of material after which the XRF signal intensity decays to 1/e, a strong function of the X-ray fluorescence energy [32]) varied between 9 and 25 lm for iron (K-edge fluorescence at 6.4 keV) and between 18 and 50 lm for copper (K-edge at 8 keV).…”
Section: Methodsmentioning
confidence: 99%
“…Once a metal impurity precipitate of interest was located, X-ray absorption microspectroscopy (l-XAS) was performed on the regions with distinct elemental composition to determine the local chemical state (see [32,33] for details). The absorption spectra allow one to determine what chemical interactions, if any, exist between individual elemental species at a given location within a metal-rich precipitate.…”
Section: Methodsmentioning
confidence: 99%
“…These beamlines at third-generation synchrotrons are capable of detecting submicron-sized metal-rich precipitates and inclusions in mc-Si. 60 …”
Section: Other Characterization Techniquesmentioning
confidence: 99%