Syntheses and mechanical properties of Mo–Si–N coatings by a hybrid coating system

Heo, Su Jeong; Kim, Kwang Ho; Kang, Myung Chang; Suh, Jin-Ho; Park, Chan-Gyung

doi:10.1016/j.surfcoat.2006.08.048

Cited by 33 publications

(22 citation statements)

References 25 publications

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“…At present, there are two groups of hard and superhard nanocomposites: (i) nc-MeN/hard phase and (ii) nc-MeN/soft phase [1]. Nanocomposite films based on hard/hard phases have attracted an overwhelming interest mainly focusing on the production, characterization and application [5][6][7][8][9][10][11] since Veprek et al [12] found Ti-Si-N nanocomposite films could get ultrahardness of 80-105 GPa and high toughness.…”

Section: Introductionmentioning

confidence: 99%

Effect of copper content and substrate bias on structure and mechanical properties of reactive sputtered CrCuN films

Tan

Zhang

et al. 2011

Journal of Alloys and Compounds

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Section: Introductionmentioning

confidence: 99%

Effect of copper content and substrate bias on structure and mechanical properties of reactive sputtered CrCuN films

Tan

Zhang

et al. 2011

Journal of Alloys and Compounds

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“…The impetus for investigating this material stems from its superior mechanical properties (hardness reported to be in the [28][29][30][31][32][33][34] GPa range compared to [18][19][20][21][22][23][24] GPa for TiN and CrN) and the lubricating properties of its surface oxides (MO x ) at elevated temperatures ([300°C) which is due to the presence of lamellar structures (Magnéli phases) that shear easily during contact loading [10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

“…The benefit of using the latter group of materials is the improved fracture toughness and the selflubricating potential, provided by the soft metal, at high temperature (properties that are important for rolling element bearings, air foil bearings, gears, etc.) In the literature, alloying elements that were incorporated in the MO-N coatings include Cu [17,18], Ag [19,20], Si [21,22], and C [23]. The addition of the optimum amount of these alloying elements was found to provide enhanced mechanical (toughness) and tribological (reduced friction coefficient and wear rate) properties.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Mo2N/MoS2/Ag Tribological Nanocomposite Coatings for Aerospace Applications

et al. 2007

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Reactively sputtered Mo 2 N/MoS 2 /Ag nanocomposite coatings were deposited from three individual Mo, MoS 2 , and Ag targets in a nitrogen environment onto Si (111), 440C grade stainless steel, and inconel 600 substrates. The power to the Mo target was kept constant, while power to the MoS 2 and Ag targets was varied to obtain different coating compositions. The coatings consisted of Mo 2 N, with silver and/or sulfur additions of up to approximately 24 at%. Coating chemistry and crystal structure were evaluated using X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), which showed the presence of tetragonal Mo 2 N and cubic Ag phases. The MoS 2 phase was detected from XPS analysis and was likely present as an amorphous inclusion based on the absence of characteristic XRD peaks. The tribological properties of the coatings were investigated in dry sliding at room temperature against Si 3 N 4 , 440C stainless steel, and Al 2 O 3 . Tribological testing was also conducted at 350 and 600°C against Si 3 N 4 . The coatings and respective wear tracks were examined using scanning electron microscopy (SEM), optical microscopy, profilometry, energy dispersive X-ray spectroscopy (EDX), and microRaman spectroscopy. During room temperature tests, the coefficients of friction (CoF) were relatively high (0.5-1.0) for all coating compositions, and particularly high against Si 3 N 4 counterfaces. During high-temperature tests, the CoF of single-phase Mo 2 N coatings remained high, but much lower CoFs were observed for composite coatings with both Ag and S additions. CoF values were maintained as low as 0.1 over 10,000 cycles for samples with Ag content in excess of 16 at% and with sulfur content in the 5-14 at% range. The chemistry and phase analysis of coating contact surfaces showed temperature-adaptive behavior with the formation of metallic silver at 350°C and silver molybdate compounds at 600°C tests. These adaptive Mo 2 N/MoS 2 /Ag coatings exhibited wear rates that were two orders of magnitude lower compared to Mo 2 N and Mo 2 N/Ag coatings, hence providing a high potential for lubrication and wear prevention of hightemperature sliding contacts.

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“…Mo-N 경질 코팅막은 높은 경도, 몰리 브덴의 좋은 용해성 때문에 스틸 기판과의 좋은 밀 착성, 낮은 마찰계수를 나타내는 것으로 알려져 있 다 [5][6][7][8] . 이러한 천이금속 질화물의 기계적 특성을 높 이기 위해 천이금속보다 작은 Al, Si 등의 원소를 첨가함으로 박막내에 치환 고용으로 인한 높은 경 도와 내마모성, 고온 안정성과 내산화성을 나타내 는 다성분계 Me-X-N(X = Al, Si, Cu, Ag 등) 박막 에 대한 연구가 지속적으로 진행되고 알려지고 있 다 [9][10][11][12][13][14][15][16] . 그 중에서도 Si를 첨가하므로 40 GPa 이상 의 초고경도를 나타내는 nc-TiN/a-Si3N4와 같은 결 정질과 비정질로 이루어진 나노복합체 미세구조에 대한 연구가 활발히 진행되었다 [17][18][19] .…”

Section: 서 론unclassified

Effect of Copper Content on the Microstructural Properties of Mo-Cu-N Films

Shin¹,

Choi²,

Wang³

et al. 2010

Journal of the Korean institute of surface engineering

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Ternary Mo-Cu-N films were deposited on Si wafer substrates with various copper contents by magnetron sputtering method using Mo target and Cu target in Ar/N 2 gaseous atmosphere. As increasing N 2 pressure, the microstructure of Mo-N films changed from γ-Mo 2 N of (111) having face-centered-cubic (FCC) structure to δ-MoN of (200) having hexagonal structure. Detailed the microstructures of the Mo-Cu-N coatings were studied by X-ray diffraction, scanning electron microscopy and field emission transmission electron microscope. The results indicated that the incorporation of copper into the growing Mo-N coating led to the Mo . 그 중에서도 Si를 첨가하므로 40 GPa 이상 의 초고경도를 나타내는 nc-TiN/a-Si3N4와 같은 결 정질과 비정질로 이루어진 나노복합체 미세구조에 대한 연구가 활발히 진행되었다 [17][18][19] . 그러나, Cu, Ag와 같은 soft metal(SM)을 첨가한 다성분계 Me-SM-N에 대한 연구는 이제 시작단계라고 할 수 있 다 11-16). 그 중에서, Mo-Cu-N 박막의 경우 MoO 3 -CuO의 이성분계 산화물에 의해 매우 낮은 마찰계

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Syntheses and mechanical properties of Mo–Si–N coatings by a hybrid coating system

Cited by 33 publications

References 25 publications

Effect of copper content and substrate bias on structure and mechanical properties of reactive sputtered CrCuN films

Effect of copper content and substrate bias on structure and mechanical properties of reactive sputtered CrCuN films

Adaptive Mo2N/MoS2/Ag Tribological Nanocomposite Coatings for Aerospace Applications

Effect of Copper Content on the Microstructural Properties of Mo-Cu-N Films

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