Synthesis and characterization of boron–oxygen–hydrogen thin films at low temperatures

Mušić, Denis; Kölpin, Helmut; Atiser, Adil; Kreißig, U.; Bobek, T.; Hadam, B.; Schneider, Jochen M.

doi:10.1016/j.materresbull.2005.03.030

Cited by 10 publications

(7 citation statements)

References 17 publications

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“…This hypothesis is supported by the uniform distribution of impurity elements over the film thickness, as detected by ERDA. The incorporation of H from residual water has been reported during physical vapour deposition in a high vacuum ambient before [25][26][27]. To the best of our knowledge, direct synthesis of crystalline AlMgB 14 films and related compounds has not been reported so far.…”

Section: Resultsmentioning

confidence: 99%

Phase stability of AlYB₁₄sputtered thin films

Kölpin¹,

Mušić²,

Henkelman³

et al. 2009

J. Phys.: Condens. Matter

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AlYB(14) (Imma) thin films were synthesized by magnetron sputtering. On the basis of x-ray diffraction, no phases other than crystalline AlYB(14) could be identified. According to electron probe microanalysis, energy dispersive x-ray analysis and elastic recoil detection analysis, the Al and Y occupancies vary in the range of 0.73-1.0 and 0.29-0.45, respectively. Density functional theory based calculations were carried out to investigate the effect of occupancy on the stability of Al(x)Y(y)B(14) (x,y = 0.25, 0.5, 0.75, 1). The mean effective charge per icosahedron and the bulk moduli were also calculated. It is shown that the most stable configuration is Al(0.5)YB(14), corresponding to a charge transfer of two electrons from the metal atoms to the boron icosahedra. Furthermore, it is found that the stability of a configuration is increased as the charge is homogeneously distributed within the icosahedra. The bulk moduli for all configurations investigated are in the range between 196 and 220 GPa, rather close to those for known hard phases such as α- Al(2)O(3).

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Section: Resultsmentioning

confidence: 99%

Phase stability of AlYB₁₄sputtered thin films

Kölpin¹,

Mušić²,

Henkelman³

et al. 2009

J. Phys.: Condens. Matter

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“…As discussed in the introduction impurities such as C [29], H [35,36], N [37] and O [13,28,30,38,39] are often observed during thin film synthesis by PVD as well as during bulk synthesis. We have shown that O impurities affect the electronic structure, bonding as well as the density and hence the elastic properties of the here considered amorphous boron rich solids.…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…Synthesis of thin films in high vacuum often results in incorporation of impurities from residual gas constituents [13,[35][36][37] or target impurities [28][29][30]38], such as C [29], H [35,36], N [37] or O [13,28,30,[37][38][39]. Such impurities can affect the structure and/or properties of the thin films [30,35,36,40]. Enhanced hardness of the so-called BAM (aluminium magnesium boride) materials has been attributed to the presence of O [30,31], while other authors have argued that O incorporation decreases hardness in BAM due to the formation of Al 2 MgBO 4 [27].…”

Section: Introductionmentioning

confidence: 99%

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Elastic properties of amorphousT_0.75Y_0.75B₁₄(T = Sc, Ti, V, Y, Zr, Nb) and the effect of O incorporation on bonding, density and elasticity (T′ = Ti, Zr)

Hunold

Keuter

Bliem

et al. 2017

J. Phys.: Condens. Matter

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We have systematically studied the effect of transition metal valence electron concentration (VEC) of amorphous T YB (a-T YB, T = Sc, Ti, V, Y, Zr, Nb) on the elastic properties, bonding, density and electronic structure using ab initio molecular dynamics. As the transition metal VEC is increased in both periods, the bulk modulus increases linearly with molar- and mass density. This trend can be understood by a concomitant decrease in cohesive energy. T' = Ti and Zr were selected to validate the predicted data experimentally. A-TiYB and a-ZrYB thin films were synthesized by high power pulsed magnetron sputtering. Chemical composition analysis revealed the presence of up to 5 at.% impurities, with O being the largest fraction. The measured Young's modulus values for a-TiYB (301 ± 8 GPa) and a-ZrYB (306 ± 9 GPa) are more than 20% smaller than the predicted ones. The influence of O incorporation on the elastic properties for these selected systems was theoretically studied, exemplarily in a-TiYBO. Based on ab initio data, we suggest that a-TiYB exhibits a very dense B network, which is partly severed in a-TiYBO. Upon O incorporation, the average coordination number of B and the molar density decrease by 9% and 8%, respectively. Based on these data the more than 20% reduced Young's modulus obtained experimentally for films containing impurities compared to the calculated Young's modulus for a-TiYB (without incorporated oxygen) can be rationalized. The presence of oxygen impurities disrupts the strong B network causing a concomitant decrease in molar density and Young's modulus. Very good agreement between the measured and calculated Young's modulus values is obtained if the presence of impurities is considered in the calculations. The implications of these findings are that prediction efforts regarding the elastic properties of amorphous borides containing oxygen impurities on the at.% level are flawed without taking the presence of impurities into account.

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“…This is consistent with the R D data analysis. Additionally, it is known that materials with a large affinity to residual gas form reaction products on the cathode surface38 as well as during alumina,39 strontium titanate,40 and boron suboxide41 growth.…”

Section: Resultsmentioning

confidence: 99%

Influence of the Chemical Composition on the Phase Constitution and the Elastic Properties of RF‐Sputtered Hydroxyapatite Coatings

Snyders

Bousser

Mušić

et al. 2008

Plasma Processes & Polymers

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We have studied the influence of chemical composition on the constitution and elastic properties of dense radio‐frequency (RF)‐sputtered hydroxyapatite (HA) coatings. The chemical composition was modified by varying the RF sputtering power density (PD). As the PD was increased by 240%, the Ca/P ratio measured by X‐ray photoelectron spectroscopy increased from ≈1.51 to ≈1.82. X‐ray diffraction indicates phase pure hexagonal HA except for the sample prepared at the highest PD where CaO and Ca3(PO4)2 also form. Deviations from the stoichiometric Ca/P ratio result in reduction of the elastic modulus. For Ca/P = 1.51 ± 0.02, the elastic modulus decreases by ≈15%. This may be due to incorporation of Ca vacancies in the lattice, while for Ca/P = 1.82 ± 0.02, the average elastic modulus decreases by ≈10% due to formation of additional phases.

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Synthesis and characterization of boron–oxygen–hydrogen thin films at low temperatures

Cited by 10 publications

References 17 publications

Phase stability of AlYB₁₄sputtered thin films

Phase stability of AlYB₁₄sputtered thin films

Elastic properties of amorphousT_0.75Y_0.75B₁₄(T = Sc, Ti, V, Y, Zr, Nb) and the effect of O incorporation on bonding, density and elasticity (T′ = Ti, Zr)

Influence of the Chemical Composition on the Phase Constitution and the Elastic Properties of RF‐Sputtered Hydroxyapatite Coatings

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Synthesis and characterization of boron–oxygen–hydrogen thin films at low temperatures

Cited by 10 publications

References 17 publications

Phase stability of AlYB14sputtered thin films

Phase stability of AlYB14sputtered thin films

Elastic properties of amorphousT0.75Y0.75B14(T = Sc, Ti, V, Y, Zr, Nb) and the effect of O incorporation on bonding, density and elasticity (T′ = Ti, Zr)

Influence of the Chemical Composition on the Phase Constitution and the Elastic Properties of RF‐Sputtered Hydroxyapatite Coatings

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Product

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About

Phase stability of AlYB₁₄sputtered thin films

Phase stability of AlYB₁₄sputtered thin films

Elastic properties of amorphousT_0.75Y_0.75B₁₄(T = Sc, Ti, V, Y, Zr, Nb) and the effect of O incorporation on bonding, density and elasticity (T′ = Ti, Zr)