Cubic SiC (3C‐SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C‐SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high‐frequency induction‐heated halide chemical vapor deposition using SiCl4, CH4, and H2 as precursors. The texture coefficient (TC(hkl)), microstructure, and deposition rate along the tube axis was studied. 3C‐SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, TC(111) was consistent with the temperature distribution. The surficial morphology of the 3C‐SiC coating changed from pebble‐like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free‐standing SiC tubes for nuclear reactors.