Synthesis and characterization of Parylene C/nanosilica composite film

Chai, Xuzhao; Liu, Jingquan; He, Qiang; Peng, Guangbin; Yang, Chunsheng

doi:10.1016/j.apsusc.2011.07.095

Cited by 9 publications

(5 citation statements)

References 18 publications

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“…This assumption is possible because of the nature of parylene-C, which is flexible as a thin film but not inherently stretchable due to its relatively low elastic strain limit (1.5%−2.8%). [36,37] The maximum length of the unfolded electrode per period is taken as the arc length of the sine wave in one period. The modeled strain is thus calculated as the percentage ratio between maximum deformation (electrode in the fully unfolded state) and original length (electrode in the relaxed folded state), as follows:…”

Section: Resultsmentioning

confidence: 99%

“…This assumption is possible because of the nature of parylene‐C, which is flexible as a thin film but not inherently stretchable due to its relatively low elastic strain limit (1.5%−2.8%). [ 36,37 ] The maximum length of the unfolded electrode per period is taken as the arc length of the sine wave in one period. The modeled strain is thus calculated as the percentage ratio between maximum deformation (electrode in the fully unfolded state) and original length (electrode in the relaxed folded state), as follows:

\begin{eqnarray} &&\hspace*{-6pt}{\mathrm{strain}}_{\%}\left(\theta ,h\right) = \frac{{L}_{\mathrm{unfolded}} - {L}_{\mathrm{relaxed}}}{{L}_{\mathrm{relaxed}}} \cdot 100\nonumber\\ &&\hspace*{6pt}=\, \frac{\int_{0}^{\lambda}\sqrt{1+\left(\pi \cdot \tan \theta \cdot \cos \left(\frac{\pi \cdot \tan \theta}{h}\cdot x\right)\right)^{2}}\textit{dx} - \lambda}{\lambda}\cdot 100 \end{eqnarray}

\begin{equation}{\mathrm{with\ }}\lambda \ = \frac{{2h}}{{{\mathrm{tan}}\theta }}\end{equation}

where λ is the wavelength of the sine wave and depends directly on h and θ .…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Origami‐Enabled Stretchable Electrodes Based on Parylene Deposition and 3D Printing

Del Duca,

Hiendlmeier,

Al Fata

et al. 2023

Adv Elect Materials

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Thin film electronic devices based on flexible biocompatible substrates are desired in various fields such as implants, soft robotics, and wearables, where stretchability is often necessary. Structure‐enabled stretchability in flexible thin films can be achieved by introducing origami‐inspired folds, thereby storing excess material in the out‐of‐plane direction to unfold upon stress. When using vapor‐deposited substrates such as parylene‐C, folds can be introduced prefabrication using molds patterned in repeated grooves and ridges. Here, this work reports the fabrication and parametrization of 10‐µm‐thick stretchable origami parylene‐C electrodes using 3D printed molds. The molds are printed with a sinusoidal pattern and tunable amplitude and slope, with accurate printing results up to 60° steepness. A 160‐nm‐thick gold layer on top of the folded parylene is patterned via laser ablation following the 3D mold shape. Depending on the design parameters, the resulting electrodes maintain functionality until 40%–100% strain. By 3D printing the molds, this technique can fabricate electrodes with complete control of the designed directions of stretchability in a rapid prototyping approach.

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Section: Resultsmentioning

confidence: 99%

\begin{eqnarray} &&\hspace*{-6pt}{\mathrm{strain}}_{\%}\left(\theta ,h\right) = \frac{{L}_{\mathrm{unfolded}} - {L}_{\mathrm{relaxed}}}{{L}_{\mathrm{relaxed}}} \cdot 100\nonumber\\ &&\hspace*{6pt}=\, \frac{\int_{0}^{\lambda}\sqrt{1+\left(\pi \cdot \tan \theta \cdot \cos \left(\frac{\pi \cdot \tan \theta}{h}\cdot x\right)\right)^{2}}\textit{dx} - \lambda}{\lambda}\cdot 100 \end{eqnarray}

\begin{equation}{\mathrm{with\ }}\lambda \ = \frac{{2h}}{{{\mathrm{tan}}\theta }}\end{equation}

where λ is the wavelength of the sine wave and depends directly on h and θ .…”

Section: Resultsmentioning

confidence: 99%

Origami‐Enabled Stretchable Electrodes Based on Parylene Deposition and 3D Printing

Del Duca,

Hiendlmeier,

Al Fata

et al. 2023

Adv Elect Materials

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“…Unless otherwise stated, all parylene in this paper are the parylene C. The raw materials or dimer of the parylene C were also purchased from SCS Company, USA. The detailed deposition process are reported earlier by our group [51]. The whole wafer was annealed in N2 atmosphere at 200°C for 36 hours.…”

Section: Introductionmentioning

confidence: 99%

Self-Closed Parylene Cuff Electrode for Peripheral Nerve Recording

Kang

Liu

Tian

et al. 2015

J. Microelectromech. Syst.

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We have designed, fabricated, and characterized a self-closed parylene cuff electrode for peripheral nerve recording, whose curliness and closeness is realized by the difference in self-stress of different parylene layers due to the heat treatments. Compared with the conventional cuff electrodes, the self-closed structure without any additional mechanical locking structure minimizes the mechanical structure of the cuff electrode. Moreover, the self-closed structure made of thin and flexible parylene film minimizes mechanical damage to the nerve and the surrounding tissues. The zero insertion force interface facilitates the connection of 16 channels with external circuits through the integrated parylene bonding pads. To reduce the impedance and increase the charge storage capacity of the electrode, the electrodeposited iridium oxide film is electrodeposited on the electrode sites. Using the fabricated self-closed parylene cuff electrode, acute neural recoding of 16 channels was performed on the rat sciatic nerve to verify the capability of recording the neural activities. The present self-closed parylene cuff electrode is promising to be used as an neural interface for peripheral nerve recording.[ 2014-0100]Index Terms-Cuff electrode, self-closed, MEMS, self-stress, electrodeposited iridium oxide film (EIROF), neural interface.

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“…Compared to pure parylene C and other pure materials such as SiO 2 , polyimide, polyethylene, alumina (Al 2 O 3 ), benzocyclobutenes (BCB) and SiO 2 /poly(methyl methacrylate) (PMMA), nanocomposite parylene C (NCPC) exhibits some interesting properties [39–47]. As an example, parylene C/Silica nanocomposites show greatly improved mechanical properties and thermal stability in comparison to pure PPXC films [48]. In a recent study, these properties, and especially thermal and UV stability, were further improved by combining nanosilica/titania particles with parylene C [49].…”

Section: Introductionmentioning

confidence: 99%

Nanocomposite–parylene C thin films with high dielectric constant and low losses for future organic electronic devices

Mokni¹,

Maggioni²,

Carturan³

et al. 2019

Beilstein J. Nanotechnol.

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Nanocomposite–parylene C (NCPC) thin films were deposited with a new technique based on the combination of chemical vapor deposition (CVD) for parylene C deposition and RF-magnetron sputtering for silver deposition. This method yields good dispersion of Ag-containing nanoparticles inside the parylene C polymer matrix. Film composition and structure were studied by using several techniques. It was found that the plasma generated by the RF-magnetron reactor modifies the film density as well as the degree of crystallinity and the size of parylene C crystallites. Moreover, silver is incorporated in the parylene matrix as an oxide phase. The average size of the Ag oxide nanoparticles is lower than 20 nm and influences the roughness of the NCPC films. Samples with various contents and sizes of silver-oxide nanoparticles were investigated by broadband dielectric spectroscopy (BDS) in view of their final application. It was found that both the content and the size of the nanoparticles influence the value of the dielectric constant and the frequency-dependence of the permittivity. In particular, β-relaxation is affected by the addition of nanoparticles as well as the dissipation factor, which is even improved. A dielectric constant of 5 ± 1 with a dissipation factor of less than 0.045 in the range from 0.1 Hz to 1 MHz is obtained for a 2.7 µm thick NCPC with 3.8% Ag content. This study provides guidance for future NCPC materials for insulating gates in organic field-effect transistors (OFETs) and advanced electronic applications.

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Synthesis and characterization of Parylene C/nanosilica composite film

Cited by 9 publications

References 18 publications

Origami‐Enabled Stretchable Electrodes Based on Parylene Deposition and 3D Printing

Origami‐Enabled Stretchable Electrodes Based on Parylene Deposition and 3D Printing

Self-Closed Parylene Cuff Electrode for Peripheral Nerve Recording

Nanocomposite–parylene C thin films with high dielectric constant and low losses for future organic electronic devices

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