The decomposition behavior of M(DPM)n (DPM = 2,2,6,6-tetramethyl-3,5-heptanedionato; M = Sr, Ba, Cu, Sm, Y, Gd, La, Pr, Fe, Co, Cr, Mn, Ce, Zr; n = 2-4) was studied in detail with infrared spectroscopy and mass spectrometry. The results indicated that the chemical bonds in these compounds dissociate generally following the sequence of C-O > M-O > C-C(CH3)3 > C-C and C-H at elevated temperatures. The decomposition processes of M(DPM)n are strongly influenced by the coordination number and central metal ion radius. In addition, the decomposed products, in air atmosphere, varied from metal oxides to metal carbonates associated with different M(DPM)n.