Mn‐doped ZnSiAs2/Si heterostructures were grown by vacuum‐thermal deposition of ZnAs2 and Mn layers on Si substrates followed by annealing. The surface contained a ZnSiAs2 film, but also micro‐crystals with a composition close to ZnAs2 or ZnSiAs2‐Si‐SiAs eutectic. The temperature and field dependencies of the magnetization were measured. Two types of magnetic phases were detected: a paramagnetic one with the mean magnetic moment of 7.6 Bohr magnetons, formed by Mn2+ ions, and a ferromagnetic one with Curie temperature 340 K in 50 kOe magnetic field, formed by MnAs clusters. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)