2020
DOI: 10.1002/sia.6779
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Synthesis and microstructure investigation of heterogeneous metal‐plasma polymer Ag/HMDSO nanoparticles

Abstract: Metal-polymer nanocomposites have gained increasing attention due to the wide potential applications field. Synthesis of nanoparticles from the gas phase is an intensively studied alternative to the chemical preparation methods. We present a onestep procedure that combines magnetron-based gas aggregation cluster source of silver nanoparticles and simultaneous plasma-enhanced chemical vapour deposition of hexamethyldisiloxane (HMDSO). The key parameter of the process, significantly influencing the morphology an… Show more

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Cited by 4 publications
(5 citation statements)
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“…Such a structure is similar to the previously reported multicore@shell arrangement of NPs synthesized when the silver target was sputtered in Ar/hexamethyldisiloxane. [ 30,31 ] The origin of such highly heterogeneous NPs with clearly distinguishable phases may be explained by two simultaneously running processes: the growth of metallic NPs and plasma polymerization of organic precursor, n ‐hexane in our case. Metallic NPs are in this scenario formed by spontaneous nucleation from iron vapor in a close vicinity of the sputtered target, where the concentration of metallic atoms is maximal.…”
Section: Resultsmentioning
confidence: 93%
“…Such a structure is similar to the previously reported multicore@shell arrangement of NPs synthesized when the silver target was sputtered in Ar/hexamethyldisiloxane. [ 30,31 ] The origin of such highly heterogeneous NPs with clearly distinguishable phases may be explained by two simultaneously running processes: the growth of metallic NPs and plasma polymerization of organic precursor, n ‐hexane in our case. Metallic NPs are in this scenario formed by spontaneous nucleation from iron vapor in a close vicinity of the sputtered target, where the concentration of metallic atoms is maximal.…”
Section: Resultsmentioning
confidence: 93%
“…While such pp‐NPs are quite easy to produce and their formation is relatively insensitive to the purity of the process, the greatest and often overlooked challenge is to collect them on the substrate. [ 55 ] Unlike metal or metal oxide NPs, the reflection of plasma polymer or plasma polymer containing NPs from a substrate readily occurs and has been observed in all our previous experiments, [ 37,40,41,49,52–54,56,57 ] even though it was not always realized at the time. In other words, while the NPs beam may be very intense (in the right conditions, the deposition rates were shown to reach values of micrometers per second), the incoming pp‐NPs may also completely rebound when they hit the substrate, leaving no deposit.…”
Section: Introductionmentioning
confidence: 82%
“…More recently, gas aggregation nanocluster sources (GAS) have been used for the preparation of metal [76][77][78][79][80][81][82] or metal oxide nanoparticles such as TiO 2 ones [83][84][85][86], mainly based on vacuum metal evaporation or magnetron sputtering. This takes place in an aggregation chamber enclosed by an orifice through which the expanding gas (usually an inert gas such as Ar or N 2 ) carries the clusters into the low-pressure deposition chamber (typically ultrahigh vacuum one) [87].…”
Section: Gas-phase Processesmentioning
confidence: 99%