“…Parylene polymers have been widely used as a coating material. − The application has been expanded in the aerospace, military, medical, semiconductor, and display industries, − due to many features and advantages of parylene such as low dielectric constant, high thermal stability, low moisture absorption, and long-term UV stability. ,− There are many variations of parylene depending on their chemical structure: parylene C, parylene D, parylene N, and parylene HT (or parylene AF4) . Among these polymers, parylene AF4 has especially received growing attention because the fluorinated structure in parylene AF4 improves its physicochemical properties significantly compared to other parylene polymers. ,,, Parylene AF4 is usually manufactured from the process of chemical vapor deposition (CVD) using 1,1,2,2,9,9,10,10-octafluoro[2.2]paracyclophane (known as AF4) as a precursor. ,, Therefore, AF4 should be prepared to manufacture parylene AF4. However, the fluorinated structure in AF4 makes its manufacturing procedure more complicated.…”