Synthesis and Performance Evaluation of BaxSr1 – xTiO3 Ceramic-Based MIM Capacitor for Energy Storage Application

Puthucheri, Smitha; Jayan, Jitha S.; Saritha, Appukuttan; Babu, V. Suresh; Shiny, G

doi:10.1080/10584587.2020.1819032

Cited by 3 publications

(1 citation statement)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…They are also used to fabricate different energy harvesting and mixed analog devices due to their low electrode resistivity [9]. Moreover, dielectric capacitors are currently the best energy storage (ES) devices since they have the highest power density and the longest lifetime [10], [11]. A micro M-I-M capacitor is a passive two-terminal component made up of two conducting parallel plates separated by a dielectric insulating substance.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Leakage Current in Micro M-I-M Structure Using Multilayer High-K Dielectric Materials with COMSOL Multiphysics

Ullah

Huang

Amirzada

et al. 2022

ELEKTRON ELEKTROTECH

View full text Add to dashboard Cite

Micro Metal-Insulator-Metal (M-I-M) capacitor structures are well-known passive components that have been broadly used in integrated circuits, Radio Frequency (RF) decoupling, Micro Electro Mechanical Systems (MEMS) sensors, and health monitoring systems. Thanks to its small dimensions, it can be easily integrated into microelectronics. With the acceleration of the scalling dawn of integrated circuits and systems, the size of the capacitor and other components must be reduced. It has become challenging to fabricate a micro M-I-M capacitor with low leakage current and high-capacity density since the leakage current and depletion effect are reported as the main factors of the gradual loss of electrical energy in the micro-M-I-M capacitor. Thus, minimizing the leakage current and the depletion effect became a new research trend. This paper presents a penta-layer high-K dielectric between the electrodes to reduce the leakage current in the micro-M-I-M capacitor. For this purpose, various dielectric materials were investigated. It was found that niobium pentaoxide (Nb2O5) and hafnium dioxide (HfO2) as penta-layer dielectric materials provide the lowest leakage current between the two electrodes. The recorded values of leakage current density are reduced to a mere 0.95 µAmps/mm2 from several µAmps/mm2 at the operating voltage of 1 V. The reported micro-M-I-M capacitor has potential application as an energy storage device.

show abstract

Section: Introductionmentioning

confidence: 99%