Abstract:Epitaxial synthesis of Ga(AsP)Ge alloys on Si(100) substrates is demonstrated using chemical vapor deposition reactions of [DGaN(CH)] with P(GeH) and As(GeH) precursors. These compounds are chosen to promote the formation of GaAsGe and GaPGe building blocks which interlink to produce the desired crystalline product. Ge-rich (GaP)Ge analogues have also been grown with tunable Ge contents up to 90% by reactions of P(GeH) with [DGaN(CH)] under similar deposition protocols. In both cases, the crystal growth utiliz… Show more
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