Synthesis and structural characterization of undoped and Co doped zinc oxide thin films obtained by aerosol assisted chemical vapour deposition

Synthesis, microstructural characterization and optical properties of undoped, V and Sc doped ZnO thin films

“…Undoped, Sc and V doped ZnO films were grown onto borosilicate 7059 glass, silicon and sapphire substrates (2.5 × 2.5 cm 2 ), using an Aerosol Assisted Chemical Vapour Deposition set up similar to that previously reported [14,15] MHz generated the aerosol that was conveyed by the carrier gas and directed towards the substrate by a nozzle, which had a periodic movement at constant velocity (∼1 cm min −1 ) to scan the whole surface of the substrate. The total number of steps was varied in order to obtain films of different thickness.…”