Si-based nanowire/nanosheet bundle complexes were synthesized from CaSi 2 crystal powders by thermal annealing under MnCl 2 /NH 4 Cl vapors. The formation of the complexes is a result of two processes that simultaneously occurred. One is the nanosheet bundle synthesis by Ca-atom extraction from the CaSi 2 crystals. Another is the growth of the Si nanowires by thermal annealing using MnCl 2 . The mixing of these materials resulted in the successful synthesis of the nanowire/nanosheet bundle complexes. In addition to the formation of the complex, nanotubes were also synthesized by bottom-up nanostructure synthesis technique, which resulted by the thermal annealing of the catalytic Mn-related materials under a higher vapor pressure using NH 4 Cl. The growth mechanism of the nanotubes is discussed based on the inhomogeneous Mn-related catalyst deposition and the surface diffusion of Si atoms.