2015
DOI: 10.7567/jjap.54.07jd02
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Synthesis and structural control of silicon and silicide nanowires/microrods using metal chloride sources

Abstract: Si and silicide nanowires/microrods were synthesized using metal-chloride-based sources by the CVD technique. In the case of Si nanowire synthesis, the morphological structures of the products depended on the distance from the source material. The distance dependence of the morphological and structural properties of the nanostructures was investigated to systemically clarify the shape modification phenomena in Si nanowire synthesis. The modification of the cross-sectional shape of the Si nanowires/microrods wa… Show more

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Cited by 6 publications
(9 citation statements)
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“…17) In contrast, the nanowire formation process is dominantly governed by the thermal annealing in the MnCl 2 vapor. [19][20][21][22] The simultaneous thermal annealing of the two source materials resulted in the successful synthesis of the nanowire/nanosheet complexes.…”
Section: Resultsmentioning
confidence: 99%
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“…17) In contrast, the nanowire formation process is dominantly governed by the thermal annealing in the MnCl 2 vapor. [19][20][21][22] The simultaneous thermal annealing of the two source materials resulted in the successful synthesis of the nanowire/nanosheet complexes.…”
Section: Resultsmentioning
confidence: 99%
“…On the other hand, the synthesis of Si nanowires from a Si wafer with the catalysts of MnSi or Mn chloride compounds, and the growth of Si nanowires with MnSi 1.7 particles on the top of the nanowires using Au catalysts were previously reported. [19][20][21][22] It is considered that Si chlorides are formed by the reaction of MnCl 2 and Si, and they are transported to the nanowire formation sites. SiCl 4 would be one of most likely species produced considering that the enthalpy of formation for MnCl 2 (−38.4 kcal/g-atom) is similar to that of SiCl 4 (−31.7 kcal/g-atom).…”
Section: Resultsmentioning
confidence: 99%
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