A polymeric precursor, polysiloxazane (PSON), for SiCON ceramics has been synthesized by the partial hydrolysis of MeViSiCl 2 , MeHSiCl 2 , and MeSiCl 3 followed by ammonolysis reaction of the hydrolyzed intermediates with NH 3 . The structure and thermal properties of the polymeric precursor were investigated by means of Fourier transfer infrared spectra (FTIR), 1 H-NMR, 29 Si-NMR, gel permeation chromatography, and thermogravimetric analysis. The structure of the SiCON ceramics derived from the pyrolysis of PSON was characterized by FTIR and X-ray diffraction. The as-synthesized PSON produced mainly a-Si 3 N 4 crystalline phase during pyrolysis at 1500 C under N 2 atmosphere, whereas when pyrolyzed at 1500 C under Ar atmosphere, crystalline phases of a/b-SiC and/or a-Si 3 N 4 were detected. V C 2012 Wiley Periodicals, Inc. J fAppl Polym Sci 126: [853][854][855][856][857][858][859] 2012