2015
DOI: 10.1002/ejic.201500493
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Synthesis, Characterization, and Thermal Properties of Chlorine‐Containing 1,1,2,2‐Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films

Abstract: Three chlorine‐containing aminodisilanes of the type Cl(RR′N)2Si–Si(NRR′)2Cl (with R = alkyl and R′ = H or R) as potential chemical vapor deposition (CVD) precursors for silicon nitride (SiNx) films have been synthesized and characterized by X‐ray diffraction; 1H, 13C, and 29Si NMR spectroscopy; and elemental analysis. They were obtained in high yields by the reactions of hexachlorodisilane (Si2Cl6) with excess liquid amines in diethyl ether through a general single‐step procedure. Their thermal properties inc… Show more

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Cited by 7 publications
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“…Due to the lower energy barrier in the second step, the intermediates will not accumulate, and SiHCl 3 and SiCl 4 are simply generated as products, facilitating catalyst recycling. Du et al 41 experimentally investigated the amination pathway of chlorosilanes and successfully synthesized Si 2 (R 2 N) 4 Cl 2 crystals. This proves the authenticity of the path proposed by Zhang and increases our study's feasibility.…”
Section: Resultsmentioning
confidence: 99%
“…Due to the lower energy barrier in the second step, the intermediates will not accumulate, and SiHCl 3 and SiCl 4 are simply generated as products, facilitating catalyst recycling. Du et al 41 experimentally investigated the amination pathway of chlorosilanes and successfully synthesized Si 2 (R 2 N) 4 Cl 2 crystals. This proves the authenticity of the path proposed by Zhang and increases our study's feasibility.…”
Section: Resultsmentioning
confidence: 99%