2012
DOI: 10.1016/j.jorganchem.2011.10.020
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Synthesis, crystal structures and thermal behavior of Ni(pda)(hfac)2 and Ni(pda)(thd)2 as potential MOCVD precursors (pda-1,3-diaminopropane, hfac-1,1,1,5,5,5-hexafluoro-2,4-pentanedionato(-), thd-2,2,6,6-tetrametyl-3,5-heptanedionato(-))

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Cited by 14 publications
(7 citation statements)
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“…43 In particular, the T 50 value for 1 was better than those of Ni(acac) 2 , Ni(acac) 2 TMEDA, 43,69 and unsymmetrical Ni β-diketonate derivatives. 1,42 The obtained T 50 values increased in the order 1 < 2 < 3 , suggesting that the compounds’ volatility followed the opposite trend. The volatilization onset (1% mass loss) displayed an analogous behaviour (Table 4), and the corresponding values were appreciably lower than those of variously substituted Ni ketoiminate compounds.…”
Section: Resultsmentioning
confidence: 98%
“…43 In particular, the T 50 value for 1 was better than those of Ni(acac) 2 , Ni(acac) 2 TMEDA, 43,69 and unsymmetrical Ni β-diketonate derivatives. 1,42 The obtained T 50 values increased in the order 1 < 2 < 3 , suggesting that the compounds’ volatility followed the opposite trend. The volatilization onset (1% mass loss) displayed an analogous behaviour (Table 4), and the corresponding values were appreciably lower than those of variously substituted Ni ketoiminate compounds.…”
Section: Resultsmentioning
confidence: 98%
“…Metal derivatives of fluorinated carboxylates and β-diketonates stabilized by diammine or glyme ligands have also been prepared starting from either metal halides or nitrates (Scheme ). …”
Section: Synthetic Methodsmentioning
confidence: 99%
“…In the presence of coordinating donor molecules, the homoleptic [M­(β-dik F ) 2 ] compounds instantly coordinate them to afford higher coordinated solvated species such as [M­(hfac) 2 (L) 2 ] [M = Cr, Mn, , Co, Cd (L = THF, py, OCMe 2 , or H 2 O)], [Cu­(ptac) 2 (EtOH)] and [Cu­(hfac) 2 (L)] (L = Bu t NH 2 , 2-ethynylpyridine), , [Cu­(β-dik F ) 2 (L) 2 ] (L = PPh 3 , imidazole, H 2 O), , [M­(hfac) 2 (M 3 PO)] 2 (M = Mn, Co, Ni; M 3 PO = 2,5,5-trimethyl-1-pyrroline- N -oxide), [M­(hfac)­(2-PyBN) 2 ]­[M­(hfac) 3 ] (M = Mn, Co, Ni, Fe; 2-PyBN = N - tert -butyl-R-(2-pyridyl)­nitrone), [Cu­(hfac) 2 (2-pyBN)], and [{Cu­(hfac) 2 (H 2 O)} 2 (μ-tetracyanoethylene)] . While the majority of these complexes are expectedly octahedral, a few of them are stabilized even in lower coordination number and have interesting structure; for example, the square planar structure of [Pd­(hfac-C)­(hfac-O,O)­(L)] (L = SEt 2 , HNMe 2 , 2,6-Me 2 py, phenoxathiin, phenazine) has one carbon-bonded hfac ligands. A number of transition metal-hfac complexes with chelating diamine ligands such as [M­(hfac) 2 (TMEDA)] (M = Fe, Mn, Co, Cu, Zn, , Cd), [M­(ttac) 2 (TMEDA)] (M = Zn, Ni, Cd), [Cd­(ttac) 2 (phen)], [Zn­(hfac) 2 (DEA)], and [Ni­(hfac) 2 (pda)] have been isolated and employed as excellent CVD precursors. In these cases, the enhanced Lewis acidity of the metal center due to the presence of fluorinated groups enables it to bind to the ancillary diamine ligand, yielding stable six-coordinated M­(II) complexes with MO 4 N 2 environment around the metals.…”
Section: Structuresmentioning
confidence: 99%
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“…Nickel-based thin films are widely utilized in the metallization industry, as, for example, contacts and local interconnects of LSIs, IC packaging, and corrosion-resistant coatings, owing to such useful properties as low electrical resistivity, high oxidation resistance, corrosion resistance, and wear resistance. [1][2][3][4][5] There are many deposition techniques used for the synthesis of Ni-based thin films, such as physical vapor deposition (PVD), 6,7) metalorganic chemical vapor deposition (MOCVD), 1,[8][9][10] and atomic layer deposition (ALD). 11,12) In most PVD techniques, conformal deposition at high-aspect ratios poses a formidable challenge.…”
Section: Introductionmentioning
confidence: 99%