2017
DOI: 10.1016/j.tsf.2017.09.021
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Synthesis of a GaN nanolayer on (001) GaAs by N ion implantation

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Cited by 3 publications
(1 citation statement)
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“…In addition, the technological integration of those nitrides combined with semiconductor materials already used in industry is promising for manufacturing systems with multiple functionalities. Gallium nitride (GaN) synthesized by N implantation into gallium arsenide (GaAs), for example, is important for microelectronics applications 5 – 7 .…”
Section: Introductionmentioning
confidence: 99%
“…In addition, the technological integration of those nitrides combined with semiconductor materials already used in industry is promising for manufacturing systems with multiple functionalities. Gallium nitride (GaN) synthesized by N implantation into gallium arsenide (GaAs), for example, is important for microelectronics applications 5 – 7 .…”
Section: Introductionmentioning
confidence: 99%