Synthesis of Al2O3@MnO2 composite abrasives and their chemical mechanical polishing performance on silicon carbide (SiC)

Zhang, Peijia; Lei, Hong; Zhang, Zefang; Zhang, Jianhua; Chen, Shidong; Hu, Xiaogang

doi:10.1016/j.ceramint.2024.03.120

Ceramics International

2024

DOI: 10.1016/j.ceramint.2024.03.120

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Synthesis of Al2O3@MnO2 composite abrasives and their chemical mechanical polishing performance on silicon carbide (SiC)

Peijia Zhang,

Hong Lei,

Zefang Zhang

et al.

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Cited by 5 publications

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Synthesis of Al2O3@MnO2 composite abrasives and their chemical mechanical polishing performance on silicon carbide (SiC)

Cited by 5 publications

References 42 publications

Preparation of SiO2@MnO2 composite abrasives and their performance in chemical-mechanical polishing of SiC substrates

Preparation of SiO2@MnO2 composite abrasives and their performance in chemical-mechanical polishing of SiC substrates

Dispersal mechanism of different dispersants and its effect on performance of 4H-SiC polishing slurry

Fabrication of a novel Mn-based slurry via chemical precipitation and ultrasonic impregnation for efficient planarization of 4H-SiC (0001) through chemical mechanical polishing

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