Synthesis of amorphous carbon nanowalls by DC-PECVD on different substrates and study of its field emission properties

Banerjee, D.; Mukherjee, S. K.; Chattopadhyay, Kalyan Kumar

doi:10.1016/j.apsusc.2010.11.119

Cited by 34 publications

(17 citation statements)

References 28 publications

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“…In comparison with other OD or ID methods [4][5][6][7], this visualization method provided more intuitive spatial distribution of plasma temperatures in the plasma area. Based on the results of Boltzmann plot and visualization of 2D excitation temperature, it was found that the excitation temperature in the N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich) due to the different excited and reaction mechanisms of nitrogen and methane.…”

Section: Discussionmentioning

confidence: 99%

“…Plasma enhanced chemical vapor deposition (PE-CVD) is among the widely used techniques [3]. Numerous studies have been performed at plasma temperature [4][5][6][7]; however, most of these studies were zero-dimensional only to give a temperature at certain point or an average temperature of several points. Only a few researchers have reported temperature mapping by plotting the temperature values at the different observation positions (ID).…”

Section: Introductionmentioning

confidence: 99%

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Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials

Shen

Miyata

Morita

et al. 2013

Journal of Energy Resources Technology

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Analysis of the two-dimensional (2D) distribution of excited Ar atoms has been made to synthesize better anode materials for lithium-ion batteries. The 2D visualization of excitation temperatures was based on the "two-line" method, which are important to diagnose the plasmas used for the preparation of carbonaceous materials by plasma enhanced chemical vapor deposition. The results showed that the excitation temperature in N2-rich (CH4-lean) plasma was lower than that in N2-lean (CH4-rich), and is attributed to different excitation and reaction mechanisms of CH4 andN2.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials

Shen

Miyata

Morita

et al. 2013

Journal of Energy Resources Technology

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show abstract

“…The substrate is usually placed on the top of the cathode (in some cases the substrate also serves as the cathode directly) since most of the applied potential difference drops in the first millimeters near the cathode, and the strong electric field and high ion flux within the cathode sheath are believed to benefit both the growth rate and the alignment of VG sheets during growth. For parallel-plate dc glow PECVD systems, the typical voltage and power for VG synthesis were −50 to −250 V and 3 kW, respectively; and the inter-electrode gap was several centimeters [33,34].…”

Section: Direct Current Plasmasmentioning

confidence: 99%

PECVD Synthesis of Vertically-Oriented Graphene: Mechanism and Plasma Sources

Chen

2015

Vertically-Oriented Graphene

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The plasma-enhanced chemical vapor deposition (PECVD) method is a key method for synthesizing vertically-oriented graphene (VG). Because the plasma region provides active species (e.g., energetic electrons, excited molecules and atoms, free radicals, and photons), PECVD offers several advantages in nanostructure synthesis, e.g., a relatively low substrate temperature, a high growth selectivity, and good control in nanostructure ordering/patterning. These features make PECVD the most suitable method for VG growth. On the other hand, the growth of VG using PECVD is a quite complex process due to the complexity of plasma chemistry. The morphology and structure of the VG sheets produced by PECVD are strongly dependent on the types of plasma sources and a series of operating parameters, such as feedstock gas type and composition, the substrate temperature, and the operating pressure. In this chapter, we first discuss the growth mechanism of VG in a PECVD process and then discuss how plasma sources affect the VG growth. Characterization of PECVD-produced VG from various plasma sources using Raman spectroscopy, a powerful tool to study carbon nanostructures, is also discussed in this chapter.

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“…In our previous works we have reported synthesis and field emission properties of amorphous carbon nanoneedle [13], nanocoil [14] and quasi vertically oriented carbon nanowall [15]. There is also another interesting carbon nanostructure that is recently being reported by various workers; which is branched or dendrite-like carbon nanofibers [16].…”

Section: Introductionmentioning

confidence: 96%

Synthesis of crystalline carbon nanofern-like structure by dc-PECVD and study of its electrical and field emission properties

Banerjee

Chattopadhyay

2012

Materials Research Bulletin

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Synthesis of amorphous carbon nanowalls by DC-PECVD on different substrates and study of its field emission properties

Cited by 34 publications

References 28 publications

Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials

Visualization of Two-Dimensional Excitation Temperatures in CH4/N2/Ar Plasmas for Preparation of Carbonaceous Materials

PECVD Synthesis of Vertically-Oriented Graphene: Mechanism and Plasma Sources

Synthesis of crystalline carbon nanofern-like structure by dc-PECVD and study of its electrical and field emission properties

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