Abstract:The potential of nanosphere lithography utilizing di-block copolymers is demonstrated. The starting configuration is a single layer of micelles, filled with silica, deposited on a ferromagnetic system. After removing the organic shell the SiO 2 cores remain on the surface and are used as shadow mask for a succeeding ion milling process. It is demonstrated how the magnetic properties of the dots can be varied by tuning either the magnetic properties of the ferromagnetic layer/multilayer or the size of the cores. Dots are created that reveal ferromagnetic or superparamagnetic properties.