Synthesis of carbon nanotubes on single crystal diamond

International audienceNanopores in insulating solid state membranes have recently emerged as potential candidates for sorting, probing and manipulating biopolymers, such as DNA, RNA and proteins in their native environment. Here a simple, fast and cost-effective etching technique to create nanopores in diamond membrane by self-assembled Ni nanoparticles is proposed. In this process, a diamond film is annealed with thin Ni layers at 800-850 degrees C in hydrogen atmosphere. Carbon from the diamond-metal interface is removed as methane by the help of Ni nanoparticles as catalyst and consequently, the nanoparticles enter the crystal volume. In order to optimize the etching process and understand the mechanism the annealed polycrystalline and nanocrystalline diamond films were analyzed by X-ray photoelectron spectroscopy (XPS), and the gas composition during the process was investigated by quadrupole mass spectrometer. With this technique, nanopores with lateral size in the range of 15-225 nm and as deep as about 550 nm in diamond membrane were produced without any need for lithography process. A model for etching diamond with Ni explaining the mechanism is discussed

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“…The growth mechanism of CNTs on diamond with Ni nanoparticles as catalyst could be found in Ref. [36].…”

Section: Gas Composition Analysismentioning

confidence: 99%

Etching mechanism of diamond by Ni nanoparticles for fabrication of nanopores

Mehedi

Arnault

Eon

et al. 2013

Carbon

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“…42,43 Vertically aligned MWCNTs have been synthesised on Ni coated single crystal diamond substrates using a glow-discharge technique. 44 Aligned CNT arrays on quartz substrate have been prepared using an injection CVD method with acetonitrile-ferrocene solutions. 45 Aligned SWCNTs can be grown directly on reduced graphene oxide.…”

Section: Cvd Synthesismentioning

confidence: 99%

Nanotubes

Coleman¹

2011

Annu. Rep. Prog. Chem., Sect. A: Inorg. Chem.

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“…Several researchers fabricated the CNTs on diamond structures by various methods. [16][17][18][19][20] Varshney et al showed CNTs on diamond structure exhibits enhanced emission properties and long-term stability as compared CNTs alone. 16 Recently, Herbert et al presented the composite nanomaterial of CNTs on BDD fabricated using partially embedded catalyst in nanocrystalline diamond lm and estimated electrochemical properties.…”

Section: Introductionmentioning

confidence: 99%

“…To achieve CNT-based sensor devices, patterning of the CNTs with a three-dimensional (3D) porous network structure is required to provide facile access to the analytes for electrochemical measurement. 21 Many researchers have studied patterning of CNTs using a variety of methods, such as template-based synthesis, 22 transferring techniques, 23 direct etching, 24 microcontact printing, 25 direct growth on a patterned catalyst, 26,27 and so on. Among the diverse CNT patterning methods, direct growth with a patterned catalyst is the most promising technique for fabricating a 3D porous network structure.…”

Section: Introductionmentioning

confidence: 99%