Synthesis of composite TiN/Ni₃N/a-Si₃N₄thin films using the plasma focus device

Abstract

Composite films of TiN/Ni 3 N/a-Si 3 N 4 were synthesized using the Mather-type plasma focus device with varying numbers of focus deposition shots (5, 15, and 25) at 0 • and 10 • angular positions. The composition and structural analysis of these films were analyzed by using Rutherford backscattering (RBS) and X-ray diffraction (XRD). Scanning electron microscope and atomic force microscope were used to study the surface morphology of films. XRD patterns confirm the formation of composite TiN/Ni 3 N/a-Si 3 N 4 films. The crystallite size of TiN (200) plane is 11 and 22 nm, respectively, at 0 • and 10 • angular positions for same 25 focus deposition shots. Impurity levels and thickness were measured using RBS. Scanning electron microscopy results show the formation of net-like structures for multiple focus shots (5, 15, and 25) at angular positions of 0 • and 10 • . The average surface roughness of the deposited films increases with increasing focus shots. The roughness of the film decreases at higher angle 10 • and the films obtained are smoother as compared with the films deposited at 0 • angular positions.

Synthesis of nano-structure tungsten nitride thin films on silicon using Mather-type plasma focus

“…It is a low-energy (3.3 kJ) Mather-type plasma focus powered by single Maxwell (30 µF, 15 kV) fast discharging capacitor. Further details and operation of plasma focus can be found elsewhere (3,(19)(20)(21). A hot, dense, short-lived, pinched plasma column is developed in the plasma focus device.…”

Synthesis of ZrSiN composite films using a plasma focus device

“…Our plasma research group have already grown TiN/Si 3 N 4 , nc-(Ti, Al) N/a-Si 3 N 4 , and TiN/Ni 3 N/a-Si 3 N 4 thin composite films using the dense plasma focus device. [20][21][22] In the present work, we synthesize composite (ZrSiN) films on silicon substrates at ambient temperature using the PF device. Microstructures, crystallite sizes, microstrains, texture coefficients, surface morphologies, and elemental concentrations of the composite films are investigated in terms of focus shots.…”