IEEJ Trans. FM
 2017
DOI: 10.1541/ieejfms.137.584
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Synthesis of Diamond Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga-ion Beam Implantation

Satoshi Kurumi
1
,
Yusuke Takahara
2
,
Takafumi Ohno
3
et al.
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