2011
DOI: 10.1016/j.actamat.2011.07.068
|View full text |Cite
|
Sign up to set email alerts
|

Synthesis of fluorine doped zinc oxide by reactive magnetron sputtering

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

2
13
0

Year Published

2012
2012
2024
2024

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 32 publications
(15 citation statements)
references
References 46 publications
2
13
0
Order By: Relevance
“…Moreover, the optimal electrical properties obtained here are comparable with some previously reported FZO films prepared by other techniques with high-temperature process on glass substrates [21][22][23][24]. Resistivity is proportional to the reciprocal of carrier concentration and mobility.…”
Section: Resultssupporting
confidence: 85%
See 1 more Smart Citation
“…Moreover, the optimal electrical properties obtained here are comparable with some previously reported FZO films prepared by other techniques with high-temperature process on glass substrates [21][22][23][24]. Resistivity is proportional to the reciprocal of carrier concentration and mobility.…”
Section: Resultssupporting
confidence: 85%
“…The figure of merit (FOM) is a parameter commonly used to evaluate transparent conductive electrodes, which applies to optimize electrode designs [21]. The FOM is usually calculated with the sheet resistance (R s ) and optical transmittance (T) at a wavelength of 550 nm as defined by Haacke [28] FOM = T 10 R s (1) Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The influence of the working parameters on the ELPPF features has been investigated through an experimental design. The experimental window was determined by a Box–Bhenken design using the design‐expert 7.0 software . Data modelling referred to as response surface modelling (RSM) provides the relationship between the studied quantity (called response) and the factors under investigation.…”
Section: Methodsmentioning
confidence: 99%
“…The experimental window was determined by a Box-Bhenken design using the design-expert 7.0 software. [44][45][46][47] Data modelling referred to as response surface modelling (RSM) provides the relationship between the studied quantity (called response) and the factors under investigation. That equation makes use of coded factors in which the 'codes' À1 and þ1 are attributed to the lowest and the highest values of the considered factors.…”
Section: Methodsmentioning
confidence: 99%
“…The ZnO thin films can be prepared by a variety of methods such as chemical vapour deposition (CVD), RF magnetron sputtering [11], DC reactive magnetron sputtering [12], metal organic chemical vapour deposition (MOCVD), molecular beam epitaxy (MBE) [13], pulsed laser deposition [14], sol−gel process [15], chemical bath deposition, etc. Of these methods, SILAR technique has several advantages over the others such as low cost, safety and easy handling.…”
Section: Introductionmentioning
confidence: 99%