“…The gas velocities are adjusted such that the reactive species interact with the substrate in less than 2-3 msec (Debroy et al, 1990). Based upon certain recent observations (Snail and Hanssen, 1991;Snail and Craigie, 1991;Glesener, Morish and Snail, 1991), literature surveys (Matsui et al, 1989;Cappelli and Paul, 1989;Cappelli and Paul, 1990;Yarbrough, Stewart and Cooper, 1990), and with the suggested modifications, growth rates on the order of 200-300 itm can be realized. Figure l(a) shows a schematic of a proposed R.F.…”