It was demonstrated that flake-like structures containing Si-based nanosheets were successfully synthesized on Si(111) substrates. By exposure of CaSi 2 /Si substrates to CrCl 2 vapor, Ca atoms were extracted from CaSi 2 , then, the Si-based nanosheets were formed. The structural properties of the Si-based nanosheets formed at the edge of the flakes were examined. It is noted that the flake-like structures were rooted to the substrates, and that the Si-based nanosheets were easily exfoliated from the flake-like structures, to expose the surfaces corresponding to the Si{111} planes of the nanosheet, originated from the corrugated Si(111) layers linked by Ca in CaSi 2 .