Synthesis of nanodimensional TiO2 thin films using energetic ion beam

Ion beam induced surface and interface engineering

“…Formation of nanosized oblate hillocks on the surface of irradiated films was investigated by AFM studies. The shape and size of nanoparticles formed is dependent on the irradiation fluence [686][687][688]. Romero-Gomez et al studied the low energy ion irradiation effect on TiO 2 thin film.…”

Effect of electron irradiation on properties of chemically deposited TiO2 nanorods

“…Therefore, more and more efforts are performed in order to develop methods for nano-or microstructuring of TiO 2 thin films. The commonly employed post-treatment methods are laser irradiation [12,13], ion bombardment [14], and electron beam irradiation [15]. Although few works on the electron irradiation effect in a TiO 2 films are available, most of them deal with the improvement of the TiO 2 photoactivity as a function of the absorbed radiation dose (MGy) [16].…”