A comparative study of the self-assembly and phase behavior of seven different oligo(ethylene glycol) (OEG)terminated alkanethiols on polycrystalline gold surfaces is presented. The general structure of the compounds is HS(CH 2 ) m -X-EG n , where m ) 11, 15; n ) 2, 4, 6, and the linkages X are amide (-CONH-), ester (-COO-), or ether (-O-) groups. The amide and ester groups give rise to the intermolecular hydrogen bonding and dipole-dipole interactions, respectively, whereas the ether lacks specific interactions. The results from contact angle goniometry, null ellipsometry, and infrared reflection-absorption spectroscopy (IRAS) indicate that the intermolecular interactions can be partly used to control the conformation and order of the OEG portion of the self-assembled monolayers (SAMs). It is shown that the lateral hydrogen bonding stabilizes the all-trans conformation of the EG 4 tails in the SAMs. Further on, the mechanism behind the thermal phase behavior of the OEG SAMs is investigated using temperature-programmed IRAS in ultrahigh vacuum. In the present study we show that the earlier reported helix-to-all-trans conformational transition at 60 °C in the