Cyclophosphazenes with different alkoxysilyl substituents were synthesized as new starting compounds for material synthesis via the sol-gel process. Their hydrolysis was investigated by FT Raman spectroscopy, and the thermal stability of the hydrolyzed and condensed new cyclophosphazenes was determined via thermogravimetric analysis. The organopolysiloxane of the type (N P(CH 2 SiO 3/2 ) 2 ) 5 is thermally stable up to 430 C in air. Cyclophosphazenes bearing 3-aminopropyltriethoxysilane (APTES) substituents were cocondensed with methacryloxypropyltrimethoxysilane, and some properties of coatings obtained from this composition were compared with the properties of a coating made from a mixture of tetraethoxysilane (TEOS) and methacryloxypropyltrimethoxysilane.