SYNTHESIS OF PEROVSKITE BUFFER LAYERS (SrTiO₃, LaA1O₃) BY LOW AND ATMOSPHERIC PRESSURE SPRAY PYROLYSIS TECHNIQUES

Abstract

Two liquid source CVD derived techniques have been employed to prepare thin films of perovskite" type: SrTi0 3 , LaA10 3 , onto different substrates : Si (100), MgO (100), Y-ZrC>2 and metallic substrates (Inconel, Hastelloy, Nickel). Different deposition conditions such as nature and concentration of both precursor and solvent, pyrolysis temperature, carrier and reaction gas nature, and their influence on the thin films characteristics, have been comparatively considered on both systems : atmospheric and low pressure.