2016
DOI: 10.13005/ojc/320117
|View full text |Cite
|
Sign up to set email alerts
|

Synthesis of Phenolic-Based Resist Materials for Photolithography

Abstract: Phenol-based photoresist for photolithography application is successfully developed in this research namely by mixing phenolic resin with ethanol solvent and sodium acetate 3-hydrate 30% of phenolic resin mass. Novolac phenolic resin is made by mixing formaldehyde and phenol in mol ratio 2,8:1 catalyzed using NaOH. Phenolic resin is made at heating temperature of 85°C and stirring rotation speed of 1000 rpm. Photoresist thin film is spincoated on the glass substrate and prebaked on the hotplate at 95°C for 60 … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Year Published

2017
2017
2020
2020

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 10 publications
0
2
0
Order By: Relevance
“…The peak in the wavenumber range of 3000 cm −1 -3700 cm −1 exhibits O-H bond, 30 in the wavenumber of 1646.91 cm −1 shows C=O bond, in the wavenumber range of 1283.24 cm −1 -1388.42 cm −1 informs the absorption peak for bending vibration C-H methyl or hydroxyl group of stretching vibration, 5 and the absorption peak of 1062.76 cm −1 shows aromatic C=H bond. 41,42 The C=H bond specifically appears at wave number 2943 cm −1 . Anthocyanins have carbonyl and hydroxyl groups that can certainly join to Ti (IV) sites that can support in excitation and removal of electrons effortlessly to the conduction band of TiO 2 .…”
Section: Resultsmentioning
confidence: 99%
“…The peak in the wavenumber range of 3000 cm −1 -3700 cm −1 exhibits O-H bond, 30 in the wavenumber of 1646.91 cm −1 shows C=O bond, in the wavenumber range of 1283.24 cm −1 -1388.42 cm −1 informs the absorption peak for bending vibration C-H methyl or hydroxyl group of stretching vibration, 5 and the absorption peak of 1062.76 cm −1 shows aromatic C=H bond. 41,42 The C=H bond specifically appears at wave number 2943 cm −1 . Anthocyanins have carbonyl and hydroxyl groups that can certainly join to Ti (IV) sites that can support in excitation and removal of electrons effortlessly to the conduction band of TiO 2 .…”
Section: Resultsmentioning
confidence: 99%
“…The anthocyanin quantity in the sample decreased as well as it's pH increased from 3 up to 7 11 . The pigment is present on the different parts of plants which including flower petals, fruits, leaves, stems, and roots 13 . The acid treatment has caused pigment spectrum absorption spreading and cell efficiency increasing.…”
mentioning
confidence: 99%