Appl. Organometal. Chem.
 2000
DOI: 10.1002/(sici)1099-0739(200006)14:6<325::aid-aoc993>3.0.co;2-n
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Synthesis of silicon-based polymer films by excimer laser-induced photo-reaction of phenylsilane and methylphenylsilane

Masaaki Suzuki1,
Okio Nishimura2,
Hiroki Nagai3
et al.
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