Synthesis of some onium salts and their comparison as cationic photoinitiators in an epoxy resist

Everett, J.; Schmidt, Donald L.; Rose, Gene D.; Argritis, P.; Aidinis, C. J.; Hatzakis, M.

doi:10.1016/s0032-3861(96)00673-8

Cited by 13 publications

(7 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…The photosensitizers used were triphenylsulfonium hexafluoroantimonate (TPS-SbF 6 ) and 1-(4-hydroxy-3-methylphenyl)tetrahydrothiophenium hexafluoroantimonate (o-CS-SbF 6 ). 52 These compounds produce acid during exposure and probably lead to the crosslinking of the polymer molecules during the postexposure baking step, altering the solubility of the material. In this way, PHEMA based formulations capable of negative tone lithography under exposure to radiation in the spectral regions where the used sensitizer absorbs were obtained.…”

Section: Imaging Reactions In Phema Films Containing Photo-acid Genermentioning

confidence: 99%

Evaluation of poly(hydroxyethyl methacrylate) imaging chemistries for micropatterning applications

et al. 2004

View full text Add to dashboard Cite

Chemical reactions leading to imaging of poly(2-hydroxyethyl methacrylate) (PHEMA) based materials are investigated. Positive imaging is obtained upon exposure to deep UV and electron beam radiation following a chain scission mechanism. The presence of the OH group adds the possibility of development in alkaline aqueous solutions with considerably higher sensitivities than in the case of PMMA. On the other hand, negative tone lithography can be achieved with the addition of photo-acid generators that induce crosslinking, arising mainly from transesterification reactions. Reaction mechanisms have been investigated mostly by MS studies supported by FTIR and UV spectroscopies. Micropatterning characteristics for deep UV and electron beam radiation have also been evaluated. Submicron patterning capabilities are demonstrated for both positive and negative imaging although higher resolution is hindered by strong swelling phenomena during development. Nevertheless, specific patterning applications including novel schemes for use in biomaterials and microsystems are anticipated.

show abstract

Section: Imaging Reactions In Phema Films Containing Photo-acid Genermentioning

confidence: 99%

Evaluation of poly(hydroxyethyl methacrylate) imaging chemistries for micropatterning applications

et al. 2004

View full text Add to dashboard Cite

show abstract

“…Initially the previously used [8] triphenylsulfonium hexafluoroantimonate (Ph 3 S + SbF 6 -) ("PAG 1") was investigated. To further study the influence of onium salt anion and cation in a more systematic manner we also used the following onium salts: triphenyl sulfonium triflate (SPh 3 + CF 3 SO 3 -) ("PAG3"), having the same cation with "PAG 1" and 2,2-bis-(3-tetrahydrothiophenium-4-hydroxyphenyl)-propane triflate (BAS triflate) ("PAG 2") [10] having the same anion with "PAG 3"but a different cation and thus, different absorption spectrum in near UV. This becomes obvious in Figure 2 (a), where characteristic emission spectra of 100 nm thick films of PVK and PVK containing DMA-DPH and PAG 1, at concentrations 2% and 4% w/w of polymer mass respectively, are presented.…”

Section: Discussionmentioning

confidence: 99%

Patterning Scheme Based on Photoacid Induced Spectral Changes for Single Layer, Patterned Full Color Light Emitting Diodes

et al. 2006

View full text Add to dashboard Cite

Photochemically induced emission tuning (PIET) for the definition of different color emitting areas in a single conducting polymeric layer is demonstrated. The commercially available poly(9-vinylcarbazole) (PVK), well known as a hole transporting layer in OLEDs technology, was used. The three primary colors emitting areas in a single layer of PVK film were defined using a suitable green emitter 1-[4-(dimethylamino)phenyl]-6-phenylhexa-1,3,5,-triene (DMA-DPH) along with the red emitter (4-dimethylamino-4'-nitrostilbene) (DANS). The selected emitters were dispersed in the PVK films in the presence of a photoacid generator (PAG). Various onium salts were tested as photoacid generators in order to select those, which could cause effectively the photoinduced protonation and emission tuning of the probes molecules. Through proton induced bleaching of the red emitter and proton induced spectral shift of the green one, the definition of all three primary colors emitting areas was possible. In this way the unexposed areas of the film remain red, the areas exposed with the intermediate dose become green and the fully exposed areas emit blue color. Intermediate colors and white light can also be obtained. Mater. Res. Soc. Symp. Proc. Vol. 965

show abstract

“…Regarding PAGs it was first shown that not only antimonate salts, which are necessary for effective cross-linking in pure epoxy systems, 14 but also triflate salts can be used in these aqueous base developable formulations. Three different PAGs were selected for further investigation and compared in the present work.…”

Section: Resist Formulation and Dissolution Studiesmentioning

confidence: 99%

Partially hydrogenated poly(vinyl phenol) based photoresist for near UV, high aspect ratio micromachining

Chatzichristidi

Raptis

Argitis

et al. 2002

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

View full text Add to dashboard Cite

show abstract

Synthesis of some onium salts and their comparison as cationic photoinitiators in an epoxy resist

Cited by 13 publications

References 15 publications

Evaluation of poly(hydroxyethyl methacrylate) imaging chemistries for micropatterning applications

Evaluation of poly(hydroxyethyl methacrylate) imaging chemistries for micropatterning applications

Patterning Scheme Based on Photoacid Induced Spectral Changes for Single Layer, Patterned Full Color Light Emitting Diodes

Partially hydrogenated poly(vinyl phenol) based photoresist for near UV, high aspect ratio micromachining

Contact Info

Product

Resources

About